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Focussing Lens for Charged Particle Beams

  • US 20070262255A1
  • Filed: 01/21/2005
  • Published: 11/15/2007
  • Est. Priority Date: 01/21/2004
  • Status: Active Grant
First Claim
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1. A focussing lens for focussing a charged particle beam onto a specimen at a predetermined landing angle comprising:

  • at least a first electrode having a first aperture to generate a focussing electric field for focussing the charged particle beam onto the specimen; and

    a correcting electrode having a curved surface to compensate for landing angle dependent distortions of the focussing electric field caused by the specimen.

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