Display device
First Claim
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1. A display device comprising:
- a substrate;
a thin film transistor formed over the substrate;
a first insulating film formed over the thin film transistor, the first insulating film having a first contact hole;
an electrode formed over the first insulating film, the electrode being in contact with one of a source region or a drain region of the thin film transistor through the first contact hole;
a second insulating film formed over the electrode, the second insulating film comprising silicon nitride and having a second contact hole; and
a pixel electrode formed over the second insulating film, the pixel electrode being in contact with the electrode through the second contact hole, wherein the second contact hole is overlapped with the first contact hole.
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Abstract
There is disclosed a structure for radiating heat generated by TFTs in a liquid crystal panel. A DLC film 125 is provided on a resin interlayer film 123 disposed on the TFTs 105, 109, and 113. The DLC film 125 can be easily formed on the resin film, and has high heat conductivity, so that the film can be made to function as a heat radiating layer.
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Citations
29 Claims
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1. A display device comprising:
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a substrate;
a thin film transistor formed over the substrate;
a first insulating film formed over the thin film transistor, the first insulating film having a first contact hole;
an electrode formed over the first insulating film, the electrode being in contact with one of a source region or a drain region of the thin film transistor through the first contact hole;
a second insulating film formed over the electrode, the second insulating film comprising silicon nitride and having a second contact hole; and
a pixel electrode formed over the second insulating film, the pixel electrode being in contact with the electrode through the second contact hole, wherein the second contact hole is overlapped with the first contact hole. - View Dependent Claims (4, 7, 10, 13, 16, 19, 22, 25)
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2. A display device comprising:
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a substrate;
a thin film transistor formed over the substrate;
a first insulating film formed over the thin film transistor, the first insulating film having a first contact hole;
an electrode formed over the first insulating film, the electrode being in contact with one of a source region or a drain region of the thin film transistor through the first contact hole;
a second insulating film formed over the electrode, the second insulating film comprising silicon nitride and having a second contact hole;
a third insulating film formed over the second insulating film, the third insulating film comprising an organic resin and having a third contact hole; and
a pixel electrode formed over the third insulating film, the pixel electrode being in contact with the electrode through the second contact hole and the third contact hole, wherein the second contact hole and the third contact hole are overlapped with the first contact hole. - View Dependent Claims (5, 8, 11, 14, 17, 20, 23, 26, 28)
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3. A display device comprising:
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a substrate;
a thin film transistor formed over the substrate;
a first insulating film formed over the thin film transistor, the first insulating film having a first contact hole;
an electrode formed over the first insulating film, the electrode being in contact with one of a source region or a drain region of the thin film transistor through the first contact hole;
a second insulating film formed over the electrode, the second insulating film comprising silicon nitride and having a second contact hole;
a third insulating film formed over the second insulating film, the third insulating film having a third contact hole; and
a pixel electrode formed over the third insulating film, the pixel electrode being in contact with the electrode through the second contact hole and the third contact hole, wherein the second contact hole and the third contact hole are overlapped with the first contact hole, and wherein size of the third contact hole is larger than that of the second contact hole. - View Dependent Claims (6, 9, 12, 15, 18, 21, 24, 27, 29)
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Specification