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Pattern forming apparatus and pattern forming method, movable member drive system and movable member drive method, exposure apparatus and exposure method, and device manufacturing method

  • US 20070263191A1
  • Filed: 02/21/2007
  • Published: 11/15/2007
  • Est. Priority Date: 02/21/2006
  • Status: Active Grant
First Claim
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1. A pattern forming apparatus that forms a pattern on an object with an energy beam via an optical system, the apparatus comprising:

  • a first movable body that moves within a predetermined plane that includes a first axis and a second axis intersecting the first axis, holding the object;

    a second movable body that moves independently from the first movable body within the predetermined plane; and

    an aerial image measuring unit a partial section of which is arranged at the first movable body and part of the remaining section of which is arranged at the second movable body, and which measures an aerial image of a mark formed via the optical system.

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