ROBOTIC COMPONENTS FOR SEMICONDUCTOR MANUFACTURING

• US 20070264106A1
• Filed: 03/05/2007
• Published: 11/15/2007
• Est. Priority Date: 11/10/2003
• Status: Abandoned Application

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Inventors: van der Meulen, Peter
• Application Number:
  US11/681,809
• Publication Number:
  US 20070264106A1
• Time in Patent Office: Days
• US Class Current: 414/217
• CPC Class Codes: B25J 9/0084 comprising a plurality of manipulators
• CPC Class Codes: B25J 9/042 comprising an articulated arm
• CPC Class Codes: B25J 9/107 of the froglegs type
• CPC Class Codes: H01L 21/67161 characterized by the layout of the process chambers
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

In embodiments of the present invention improved capabilities are described for robots and robotic arms operating within a semiconductor manufacturing environment.

Claims

1-25. -25. (canceled)

26. A system comprising:

a plurality of linkable processing modules, each linkable processing module capable of performing one or more fabrication processes on a workpiece, and the plurality of linkable processing modules linked together to maintain a controlled environment wherein a first one of the plurality of linkable processing modules provides an entry point for processing of the workpiece and a second one of the plurality of linkable processing modules provides an exit point for processing of the workpiece; and

one or more robots within the controlled environment, the one or more robots configured to hand off the workpiece to one another, wherein the one or more robots include at least one of a three link SCARA robot, a four link SCARA robot, a dual three link SCARA robot, a dual four link SCARA robot, a frog-leg robot, a dual frog-leg robot, a leap frog-leg robot, a transport robot, an independent dual-end effector robot, a telescoping robotic arm, a robot having at least one auxiliary arm, and a dual substrate transport robot.

27. The system of claim 26 wherein the one or more robots include a plurality of robots that hand off to each other using a buffer station.

28. The system of claim 27 wherein the buffer station is capable of performing a processing step including one or more of heating, cooling, aligning, inspecting, testing, or cleaning the workpiece.

29. The system of claim 26 wherein the one or more robots include at least one robot positioned on a stationary base.

30. The system of claim 26 wherein the one or more robots include at least one robot having a robot drive with a removable cartridge.

31. The system of claim 26 wherein the one or more robots includes a plurality of robots, each one of the plurality of robots controlled independently by a controller.

32. The system of claim 31 wherein the one or more robots includes at least one robot positioned using real-time feedback from at least one sensor.

33. The system of claim 32 wherein communication between the at least one sensor and the controller is wireless communication.

34. The system of claim 31 wherein the controller includes an interface that recognizes the at least one robot when it is attached to the system.

35. A system comprising:

a robotic drive, operation of the robotic drive controlled with a controller integrated with a visualization software program;

an end effector for manipulating items, and

a robotic arm that connects the robotic drive to the end effector, the robotic arm including a plurality of links interconnected to each other such that the end effector moves in a substantially linear direction under control of the robotic drive, the robotic arm including a facility for alignment of the end effector.

36. The system of claim 35 wherein the plurality of links includes three or more links.

37. The system of claim 36 wherein the sum of the length of link one and link three is equal to the length of link two, the length of link one is longer than the length of link two.

38. The system of claim 35 wherein the robotic drive is disposed in a removable cartridge.

39. The system of claim 35 wherein the facility for alignment includes a sensor for sensing an alignment of the end effector.

40. The system of claim 39 wherein the sensor is used to train the robotic arm.

41. The system of claim 39 wherein the sensor is used to position the robotic arm.

42. The system of claim 35 wherein the robotic drive controls each robotic link individually.

43. The system of claim 35 wherein the robotic drive controls each one of the plurality of links with at least one of a belt and a mechanical linkage.

44. The system of claim 35 wherein the end effector is offset from a centerline of the plurality of links.

45. A system comprising:

a plurality of process modules adapted to process a workpiece;

a vacuum environment interconnecting the plurality of process modules;

a load lock coupling the vacuum environment to an external environment to permit passage of the workpiece therebetween; and

at least two SCARA-type robotic arms within the vacuum environment, at least one of the SCARA-type robotic arms including three or more links, and the at least two SCARA-type robotic arms configured to transport the workpiece between the plurality of process modules.