Method of Making a MOS-Gated Transistor with Reduced Miller Capacitance

• US 20070264782A1
• Filed: 07/27/2007
• Published: 11/15/2007
• Est. Priority Date: 10/08/2004
• Status: Active Grant

• Current Assignee: Semiconductor Components Industries LLC (ON Semiconductor Corporation)
• Original Assignee: Christopher Kocon, Praveen Shenoy
• Inventors: Kocon, Christopher, Shenoy, Praveen
• Granted Patent: US 7,534,683 B2
• Time in Patent Office: Days
• US Class Current: 438/270
• CPC Class Codes: H01L 29/0623 Buried supplementary region, e.g. buried guard ring multi-RESURF H01L29/0634
• CPC Class Codes: H01L 29/0696 of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
• CPC Class Codes: H01L 29/1095 Body region, i.e. base region, of DMOS transistors or IGBTs cell layout H01L29/0696
• CPC Class Codes: H01L 29/66734 with a step of recessing the gate electrode, e.g. to form a trench gate electrode
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236

Abstract

A trench MOS-gated transistor is formed as follows. A first region of a first conductivity type is provided. A well region of a second conductivity type is then formed in an upper portion of the first region. A trench is formed which extends through the well region and terminates within the first region. Dopants of the second conductivity type are implanted along predefined portions of the bottom of the trench to form regions along the bottom of the trench which are contiguous with the well region such that when the transistor is in an on state the deeper portion of the well region prevents a current from flowing through those channel region portions located directly above the deeper portion of the well region.

Claims

1. A method of forming a trench MOS-gated transistor, the method comprising:

providing a first region of a first conductivity type;

forming a well region of a second conductivity type in an upper portion of the first region;

forming a trench extending through the well region and terminating within the first region, portions of the well region extending along the trench sidewalls forming channel regions; and

implanting dopants of the second conductivity type along predefined portions of the bottom of the trench to form a plurality of second regions extending deeper than a bottom surface of the well region, each of the plurality of second regions being contiguous with the well region such that when the transistor is in an on state the plurality of second regions prevent a current from flowing through those channel region portions located directly above the plurality of second regions.

2. The method of claim 1 wherein the first region is an epitaxial layer, the method further comprising:

forming the epitaxial layer over a substrate of the first conductivity type.

3. The method of claim 1 further comprising:

lining the trench sidewalls and bottom with dielectric layer;

at least partially filling the trench with polysilicon material; and

forming source regions of the first conductivity type in the well region, the source regions flanking each side of the gate trench.

4. The method of claim 1 wherein at least one of the first region, the well region, and the plurality of second regions is from one of crystalline silicon (Si), silicon carbide (SiC), gallium nitride (GaN), and silicon germanium (SiGe).

5. A method of forming a trench MOS-gated transistor, the method comprising:

providing a silicon substrate;

forming a silicon epitaxial layer of a first conductivity type over the substrate;

forming a well region of a second conductivity type in an upper portion of the silicon epitaxial layer;

forming a trench extending through the well region and terminating within the epitaxial silicon layer;

implanting dopants of the second conductivity type along the bottom of the trench to form a region of the second conductivity type extending along a bottom portion of the trench such that a gap is formed between the silicon region and the well region through which gap a current flows when the transistor is in an on state;

forming source regions of the first conductivity type flanking each side of the trench, whereby potions of the well region extending along outer sidewalls of each of the plurality of gate trenches form channel regions; and

filling the trench with a polysilicon material at least up to and partially overlapping with the source regions.

6. The method of claim 5 further comprising:

forming source regions of the first conductivity type flanking each side of the trench; and

filling the trench with a polysilicon material at least up to and partially overlapping with the source regions.

7. The method of claim 5 wherein the silicon region has a thickness in the range of 0.1-0.3 μ

m.

8. A method of forming a trench MOS-gated transistor, the method comprising:

providing a first region of a first conductivity type;

performing a shallow implant of dopants of a second conductivity type into the first region;

performing a deep implant of dopant of the second conductivity type into the first region;

performing a temperature cycle after the deep and shallow implant steps to drive the respective implanted dopants deeper into the first region to thereby form a well region corresponding to the shallow implant and a second region corresponding to the deep implant, the deepest portion of the second region being deeper than a bottom surface of the well region; and

forming a trench having a first portion extending through the well region and terminating within the first region and a second portion extending through the well region and terminating within the second region.

9. The method of claim 8 wherein portions of the well region extending along sidewalls of the trench form channel regions, and wherein after the temperature cycle the second region is contiguous with the well region such that the second region prevents a current from flowing through those channel region portions located directly above the second region.

10. The method of claim 8 wherein after the temperature cycle the second region is spaced from the well region such that after the trench is formed the spacing between the second region and the well region forms a gap through which a current flows when the transistor is in an on state.

11. The method of claim 8 wherein the deep implant step is carried out using a masking layer.

12. The method of claim 8 wherein at least one of the first region, the well region, and the second region is from one of crystalline silicon (Si), silicon carbide (SiC), gallium nitride (GaN), and silicon germanium (SiGe).

13. A method of forming a trench MOS-gated transistor, the method comprising:

providing a first region of a first conductivity type;

performing a shallow implant of dopants of a second conductivity type into the first region;

performing a temperature cycle to drive the implanted dopants deeper into the first region;

performing a second implant of dopants of the second conductivity type into the first region;

performing a temperature cycle to drive the implanted dopants from the second implant step deeper into the silicon region and to drive the dopants from the shallow implant step even deeper into the silicon to thereby form a well region corresponding to the second implant and a second region corresponding to the shallow implant, the deepest portion of the second region being deeper than a bottom surface of the well region; and

forming a trench having a first portion extending through the well region and terminating within the silicon region and a second portion extending through the well region and terminating within the second region

14. The method of claim 13 wherein portions of the well region extending along sidewalls of the trench form channel regions, and after the temperature cycle the second region is contiguous with the well region such that the second region prevents a current from flowing through those channel region portions located directly above the second region.

15. The method of claim 13 wherein after the temperature cycle the second region is spaced from the well region such that after the trench is formed the spacing between the second region and the well region forms a gap through which a current flows when the transistor is in an on state.

16. The method of claim 13 wherein at least one of the first region, the well region, and the second region is from one of crystalline silicon (Si), silicon carbide (SiC), gallium nitride (GaN), and silicon germanium (SiGe).