Cleaining Process and Operating Process for a Cvd Reactor

• US 20070264807A1
• Filed: 07/12/2005
• Published: 11/15/2007
• Est. Priority Date: 08/30/2004
• Status: Abandoned Application

• Current Assignee: LPE S.p.A. (ASM International NV), E.T.C. Epitaxial Technology Center S.r.l.
• Original Assignee: LPE S.p.A. (ASM International NV), E.T.C. Epitaxial Technology Center S.r.l.
• Inventors: Masi, Maurizio, Crippa, Danilo, Preti, Franco, Valente, Gianluca, Abbondanza, Giuseppe, Leone, Stefano, Mauceri, Marco
• Application Number:
  US11/660,689
• Publication Number:
  US 20070264807A1
• Time in Patent Office: Days
• US Class Current: 438/507
• CPC Class Codes: B08B 7/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass
• CPC Class Codes: C23C 16/4404 Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
• CPC Class Codes: C23C 16/4405 Cleaning of reactor or parts inside the reactor by using reactive gases
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence

Abstract

The present invention relates to a process for cleaning the reaction chamber (12) of a CVD reactor, comprising the steps of heating the chamber walls to a suitable temperature and introducing a gas flow into the chamber, this cleaning process may be advantageously used within an operating process of a CVD reactor for depositing semiconductor material onto substrates inside a chamber; this operating process envisages a growth process comprising the sequential and cyclical loading of the substrates into the chamber (12), deposition of semiconductor material onto the substrates and unloading of the substrates from the chamber (12); after unloading a process for cleaning the chamber (12) is performed. The invention also relates to process for cleaning the entire CVD reactor, which envisages, together with heating, the presence of chemical etching components in the gas flow.

Claims

1. Process for cleaning the reaction chamber of a hot-wall CVD reactor, the walls of the chamber being lined with a protective layer of silicon carbide, tantalum carbide or niobium carbide, comprising the steps of:

heating the walls of the chamber to a temperature not lower than that for start of sublimation of the material to be removed; and

introducing a gas flow into the chamber.

2. Cleaning process according to claim 1, in which said material to be removed is silicon carbide.

3. Cleaning process according to claim 1, in which said gas comprises a noble gas, preferably argon or helium.

5. Cleaning process according to claim 1, in which said gas comprises hydrogen or hydrochloric acid or hydrobromic acid.

6. Cleaning process according to claim 1, in which said gas comprises hydrochloric acid and a noble gas.

7. Cleaning process according to claim 1, in which said gas comprises hydrochloric acid and hydrogen.

8. Cleaning process according to claim 1, in which the walls of the chamber are heated to a temperature higher than 1800°

C., preferably between 1800°

C. and 2400°

C., more preferably between 1900°

C. and 2000°

C.

9. Cleaning process according to claim 1, comprising:

a first period where the temperature of the walls of the chamber is increased;

a second period where the temperature of the walls of the chamber is maintained;

a third period where the temperature of the walls of the chamber is reduced.

10. Cleaning process according to claim 9, in which the gas flow during the second period is greater than the gas flow during the first period, preferably five to twenty times greater.

11. Cleaning process according to claim 10, in which the gas flow during the third period is substantially the same as or greater than the gas flow during the second period, preferably one to three times greater.

12. Operating process of a hot-wall CVD reactor for depositing semiconductor material on substrates, the reactor being equipped with a reaction chamber for depositions, the walls of the chamber being lined with a protective layer of silicon carbide, tantalum carbide or niobium carbide, which envisages a growth process comprising the sequential and cyclical execution of:

a process for loading the substrates in the chamber;

a process for deposition of semiconductor material onto the substrates;

a process for unloading the substrates from the chamber;

characterized in that, after an unloading process, a process for cleaning the chamber according to one or more of claim 1 is performed.

13. Operating process according to claim 12, in which a purging process is performed after the loading process and before the deposition process.

14. Operating process according to claim 12, in which the chamber cleaning process is performed after each unloading process.

15. Operating process according to claim 12, in which the chamber cleaning process is performed after a predetermined number of unloading processes.

16. Operating process according to claim 15, in which said number ranges between two and ten.

17. Operating process according to claim 14, in which the cleaning process lasts less than the growth process.

18. Operating process according to claim 17, in which the cleaning process lasts between ½

and ¼

of the growth process.

19. Operating process according to one of claim 12, in which silicon carbide is deposited during the deposition process.

20. Operating process according to claim 19, in which the deposition of silicon carbide is performed at a temperature of between 1500°

C. and 1700°

C., preferably between 1550°

C. and 1650°

C.

21. Operating process according to one of claim 12, in which first of all the walls of the reactor are provided with at least one surface layer of tantalum carbide or niobium carbide.

22. CVD reactor for depositing semiconductor material on substrates, characterized in that it comprises means that implements an operating process according to one or more of claim 12.

4. Process for cleaning a hot-wall CVD reactor, the walls of the reactor being lined with a protective layer of silicon carbide, tantalum carbide or niobium carbide, comprising the steps of:

heating the walls of the reactor, the heating temperature for the reactor walls being not lower than that for start of sublimation of the material to be removed; and

introducing a gas flow in contact with the walls of the reactor to be cleaned, said gas comprising at least one component which is reactive in relation to said material to be removed.