Semiconductor device manufacturing apparatus and method of using the same
First Claim
1. A manufacturing apparatus for processing substrates, comprising:
- a process chamber;
a process fluid supply unit including a fluid supply line, and a showerhead disposed at an upper portion of the process chamber and to which the fluid supply line is connected whereby the showerhead injects fluid fed through the fluid supply line into the process chamber; and
a plasma supply unit including a remote plasma reactor disposed outside of the process chamber, and a plasma supply line connected to the remote plasma reactor and to the process chamber, the plasma supply line having an open end disposed at the upper portion of the process chamber such that plasma generated by the remote plasma reactor is injected downward into the process chamber from the upper portion of the process chamber.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor device manufacturing apparatus and a method for use in the manufacturing of such devices minimize the amount of particles which accumulate in the process chamber of the apparatus and clean the interior of the process chamber with a high degree of effectiveness. The semiconductor device manufacturing apparatus has a showerhead located at an upper portion of the process chamber, a plate-like gas diffuser disposed in the showerhead, and both a fluid supply line and a plasma waveguide connected to the showerhead. After a substrate is processed in the process chamber using process gas delivered to the showerhead through the fluid supply line, plasma is supplied into the upper portion of the process chamber from a remote plasma reactor via the plasma waveguide.
180 Citations
20 Claims
-
1. A manufacturing apparatus for processing substrates, comprising:
-
a process chamber; a process fluid supply unit including a fluid supply line, and a showerhead disposed at an upper portion of the process chamber and to which the fluid supply line is connected whereby the showerhead injects fluid fed through the fluid supply line into the process chamber; and a plasma supply unit including a remote plasma reactor disposed outside of the process chamber, and a plasma supply line connected to the remote plasma reactor and to the process chamber, the plasma supply line having an open end disposed at the upper portion of the process chamber such that plasma generated by the remote plasma reactor is injected downward into the process chamber from the upper portion of the process chamber. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A manufacturing apparatus for processing substrates, comprising:
-
a process chamber; a process fluid supply unit including a process gas supply source having at least one source of gas used in the processing of a substrate within the process chamber, a fluid supply line, and a showerhead disposed at an upper portion of the process chamber and to which the fluid supply line is connected whereby the showerhead injects fluid fed through the fluid supply line from the process gas supply source into the process chamber; and a plasma supply unit including a remote plasma reactor disposed outside of the process chamber, and a plasma supply line connected to the remote plasma reactor and to the process chamber, the plasma supply line having an open end disposed at the upper portion of the process chamber such that plasma generated by the remote plasma reactor is injected downward into the process chamber from the upper portion of the process chamber. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
-
-
15. A substrate processing method comprising:
-
supporting a substrate in a lower portion of a process chamber; subsequently injecting a processing medium comprising gas into the process chamber from an upper portion of the process chamber, and processing the substrate using the processing medium; subsequently cleaning the interior of the process chamber by generating a cleaning plasma outside the process chamber, and injecting the cleaning plasma into the process chamber from the upper portion of the process chamber. - View Dependent Claims (17, 18, 20)
-
- 16. The method according to claim 16, wherein the processing of the substrate using the processing medium comprises exciting the process gas within the process chamber to convert the process gas into a plasma within the process chamber.
Specification