DRIVING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
First Claim
1. A driving apparatus which comprises a stator and two movable elements, said stator including a first area and a second area, and said movable elements being capable of moving on said stator,said movable elements including magnets,said stator including a coil unit,said coil unit including a driving coil configured to independently drive said two movable elements when said two movable elements are situated within the first area and the second area, respectively, and a swap coil configured to swap said two movable elements between the first area and the second area, and said coil unit being configured such that said swap coil and at least part of said driving coil are superimposed on each other.
1 Assignment
0 Petitions
Accused Products
Abstract
A driving apparatus which comprises a stator and two movable elements. The stator includes a first area and a second area. The movable elements can move on the stator. The movable elements include magnets, while the stator includes a coil unit. The coil unit includes a driving coil which independently drives the two movable elements within the first area and the second area, and a swap coil which swaps the two movable elements between the first area and the second area. The coil unit is configured such that the swap coil and at least part of the driving coil are superimposed on each other.
-
Citations
12 Claims
-
1. A driving apparatus which comprises a stator and two movable elements, said stator including a first area and a second area, and said movable elements being capable of moving on said stator,
said movable elements including magnets, said stator including a coil unit, said coil unit including a driving coil configured to independently drive said two movable elements when said two movable elements are situated within the first area and the second area, respectively, and a swap coil configured to swap said two movable elements between the first area and the second area, and said coil unit being configured such that said swap coil and at least part of said driving coil are superimposed on each other.
-
7. An exposure apparatus which executes an alignment measurement process and an exposure process in parallel, comprising:
-
a stage device which comprises a stator and two movable elements, said stator including a measurement area and an exposure area, and said movable elements being capable of moving on said stator and each including a chuck configured to hold a substrate; a measurement unit configured to execute the measurement process within the measurement area; and an exposure unit configured to execute the exposure process for the substrate within the exposure area while aligning the substrate on the basis of the measurement result obtained by said measurement unit, said movable elements including magnets, said stator including a coil unit, said coil unit including a driving coil configured to independently drive said two movable elements within the measurement area and the exposure area, and a swap coil configured to swap said two movable elements between the measurement area and the exposure area, and said coil unit being configured such that said swap coil and at least part of said driving coil are superimposed on each other. - View Dependent Claims (8, 9, 10, 12)
-
Specification