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Plasma Immersion Ion Implantation Using Conductive Mesh

  • US 20070268089A1
  • Filed: 10/28/2004
  • Published: 11/22/2007
  • Est. Priority Date: 10/31/2003
  • Status: Abandoned Application
First Claim
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1. A plasma processor for modifying at least a region of a surface of a component;

  • wherein said component is bombarded by ions from a gas plasma environment;

    said ions are drawn towards said component by a voltage source applied to a first mesh, wherein said first mesh is a stationary non-conformal conductive mesh;

    characterised in that the component does not contact the first mesh and the component is moved in the vicinity of said first mesh to evenly expose it to ion bombardment.

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