Plasma Immersion Ion Implantation Using Conductive Mesh
First Claim
Patent Images
1. A plasma processor for modifying at least a region of a surface of a component;
- wherein said component is bombarded by ions from a gas plasma environment;
said ions are drawn towards said component by a voltage source applied to a first mesh, wherein said first mesh is a stationary non-conformal conductive mesh;
characterised in that the component does not contact the first mesh and the component is moved in the vicinity of said first mesh to evenly expose it to ion bombardment.
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Abstract
A plasma process (5) for modifying at least a region of a surface of a component (1); wherein the component (1) is bombarded by ions from a gas plasma environment (4); and the ions are drawn towards the component (1) by a voltage source applied to a first mesh (3). The first mesh (3) is a stationary non-conformal mesh (3), and the component (1) does not contact the first mesh (3). The component (1) is moved (2) in the vicinity of the first mesh (3) to evenly expose it to ion bombardment (4).
36 Citations
16 Claims
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1. A plasma processor for modifying at least a region of a surface of a component;
wherein said component is bombarded by ions from a gas plasma environment;
said ions are drawn towards said component by a voltage source applied to a first mesh, wherein said first mesh is a stationary non-conformal conductive mesh;
characterised in that the component does not contact the first mesh and the component is moved in the vicinity of said first mesh to evenly expose it to ion bombardment.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for modifying a surfaces of a component;
- wherein said component is bombarded by ions from a gas plasma environment;
said ions are drawn towards said component by a voltage source applied to a first mesh, wherein said first mesh is a stationary non-conformal conductive mesh;
characterised in that the component does not contact the first mesh and the component is moved in the vicinity of said first mesh to evenly expose it to ion bombardment. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
- wherein said component is bombarded by ions from a gas plasma environment;
Specification