Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices

• US 20070268474A1
• Filed: 07/24/2007
• Published: 11/22/2007
• Est. Priority Date: 03/03/2000
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Owa, Soichi, Omura, Yasuhiro, Shiraishi, Naomasa
• Granted Patent: US 7,319,508 B2
• Time in Patent Office: Days
• US Class Current: 355/67
• CPC Class Codes: G02B 13/24 for reproducing or copying at short object distances
• CPC Class Codes: G02B 17/08 Catadioptric systems used in non-imaging applications G02B19/00
• CPC Class Codes: G02B 17/0892 specially adapted for the UV
• CPC Class Codes: G03F 7/70225 Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Abstract

A catadioptric optical system forms an image of a first surface onto a second surface. The system includes a first lens having a first optical axis, a combination of a concave mirror and a second lens, the combination having a second optical axis, a third lens having a third optical axis, a first reflection plane that is arranged in an optical path between the first lens and the combination, and a second reflection plane that is arranged in an optical path between the combination and the third lens. An intersection line of an extension plane of the first reflection plane and an extension plane of the second reflection plane is set up so that the first optical axis, the second optical axis and the third optical axis intersect at one point. In addition, at least one of the first lens and the third lens is movable.

Claims

1. A catadioptric optical system forming an image of a first surface onto a second surface comprising:

a first lens having a first optical axis;

a combination of a concave mirror and a second lens, the combination having a second optical axis;

a third lens having a third optical axis;

a first reflection plane that is arranged in an optical path between the first lens and the combination; and

a second reflection plane that is arranged in an optical path between the combination and the third lens,

wherein an intersection line of an extension plane of the first reflection plane and an extension plane of the second reflection plane is set up so that the first optical axis, the second optical axis and the third optical axis intersect at one point, and

wherein at least one of the first lens and the third lens is movable.

2. The catadioptric optical system according to claim 1, wherein the movable lens is movable in the optical axis direction.

3. The catadioptric optical system according to claim 2, wherein the movable lens is tiltable.

4. The catadioptric optical system according to claim 3, wherein intermediate images of the first surface are formed in an optical path between the first reflection plane and the combination, and in an optical path between the combination and the second reflection plane.

5. The catadioptric optical system according to claim 3, further comprising a group of lenses that is arranged in an optical path between the first surface and the first reflection plane, and another group of lenses that is arranged in an optical path between the second reflection plane and the second surface.

6. The catadioptric optical system according to claim 2, further comprising another lens that is arranged within the combination.

7. The catadioptric optical system according to claim 2, wherein the second lens is a negative lens.

8. The catadioptric optical system according to claim 7, wherein the second lens is a meniscus lens.

9. The catadioptric optical system according to claim 1, wherein a refractive index of the first lens and a refractive index of the third lens are the same.

10. The catadioptric optical system according to claim 1, further comprising a monolithic member, wherein the first and second reflection planes are formed on the monolithic member.

11. The catadioptric optical system according to claim 1, wherein the first optical axis and the third optical axis are coaxial.

12. The catadioptric optical system according to claim 11, wherein the second optical axis is perpendicular to the first and the third optical axes.

13. The catadioptric optical system according to claim 1, wherein the catadioptric optical system is a bi-telecentric optical system.

14. The catadioptric optical system according to claim 1, wherein the catadioptric optical system forms the image of the first surface onto an area of the second surface, and wherein the area is located off the third optical axis.

15. The catadioptric optical system according to claim 1, wherein the catadioptric optical system has a unit magnification.