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Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices

  • US 20070268474A1
  • Filed: 07/24/2007
  • Published: 11/22/2007
  • Est. Priority Date: 03/03/2000
  • Status: Active Grant
First Claim
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1. A catadioptric optical system forming an image of a first surface onto a second surface comprising:

  • a first lens having a first optical axis;

    a combination of a concave mirror and a second lens, the combination having a second optical axis;

    a third lens having a third optical axis;

    a first reflection plane that is arranged in an optical path between the first lens and the combination; and

    a second reflection plane that is arranged in an optical path between the combination and the third lens, wherein an intersection line of an extension plane of the first reflection plane and an extension plane of the second reflection plane is set up so that the first optical axis, the second optical axis and the third optical axis intersect at one point, and wherein at least one of the first lens and the third lens is movable.

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