Micro-oscillation element

• US 20070268549A1
• Filed: 07/25/2007
• Published: 11/22/2007
• Est. Priority Date: 08/12/2003
• Status: Abandoned Application

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited, Fujitsu Media Devices Limited (Fujitsu Limited)
• Inventors: Tsuboi, Osamu, Soneda, Hiromitsu, Okuda, Hisao, Ueda, Satoshi, Sawaki, Ippei, Kouma, Norinao, Nakamura, Yoshitaka, Xiaoyu, Mi
• Application Number:
  US11/878,525
• Publication Number:
  US 20070268549A1
• Time in Patent Office: Days
• US Class Current: 359/238
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.

Claims

1. :

A micro-oscillation element comprising;

an oscillation section;

a main frame;

a first spring and a second spring that cause the oscillation section to be supported by the frame;

a first actuating section connected to the frame via the first spring;

a second actuating section connected to the frame via the second spring;

a first thin section connecting the oscillation section and the first actuating section; and

a second thin section connecting the oscillation section and the second actuating section;

wherein the oscillation section is located between the first spring and the second spring, each of the first spring and the second spring being deformable along with oscillation of the oscillation section;

wherein the first and the second actuating sections are located between the first and the second springs, the oscillation section being located between the first and the second actuating sections, each of the first and the second actuating sections being movable in moving directions of the oscillation section, the first spring being deflectable as the first actuating section is displaced, the second spring being deflectable as the second actuating section is displaced.

3. :

The micro-oscillation element according to claim 1, wherein the first and the second springs are plate springs.

4. :

The micro-oscillation element according to claim 1, further comprising at least one torsion bar for defining an oscillation axis of oscillation of the oscillation section.

12. :

The micro-oscillation element according to claim 1, wherein a difference between a frequency of the driving force generated by the first and second actuators and a resonance frequency of the oscillation of the oscillation section is 1% or less of the resonance frequency.

13. :

The micro-oscillation element according to claim 1, wherein the oscillation section is provided with a mirror face for reflecting light.

2. (canceled)

5-11. -11. (canceled)

14-18. -18. (canceled)