DESICCANT IN A MEMS DEVICE
First Claim
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1. A MEMS based device, comprising:
- a substrate having a MEMS device formed thereon;
a backplate;
a desiccant disposed between the backplate and the substrate; and
a cover at least partially encapsulating said desiccant, wherein said desiccant is exposed or activated.
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Abstract
A package structure and method for packaging a MEMS device is described. In one embodiment, the MEMS base device can include a substrate having a MEMS device formed thereon, a backplate, an exposed or activated desiccant disposed between the backplate and the transparent substrate, and a cover at least partially encapsulating said desiccant. In another embodiment, a MEMS display device can be manufactured by contacting the substrate and/or backplate with a cover which at least partially encapsulates a desiccant, joining the backplate and the substrate to form a package, and exposing or activating the desiccant.
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Citations
35 Claims
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1. A MEMS based device, comprising:
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a substrate having a MEMS device formed thereon; a backplate; a desiccant disposed between the backplate and the substrate; and a cover at least partially encapsulating said desiccant, wherein said desiccant is exposed or activated. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of manufacturing a display device, comprising:
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providing a substrate having a MEMS device formed thereon; providing a backplate; contacting the substrate and/or the backplate with a cover, wherein the cover at least partially encapsulates a desiccant; joining the backplate to the substrate to form a package, wherein the MEMS device is encapsulated by the package; and exposing or activating the desiccant. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A MEMS based device, comprising:
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means for transmitting light; means for interferometrically reflecting light through said transmitting means formed on said transmitting means; means for encapsulating said interferometrically reflecting means; and means for desiccating an environment surrounding said interferometrically reflecting means, said desiccating means is exposed or activated; means for protecting said desiccating means, said protecting means is positioned between the encapsulating means and the transmitting means. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35)
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Specification