METHOD OF FORMING A RELIABLE ELECTROCHEMICAL CAPACITOR

• US 20070271751A1
• Filed: 08/10/2007
• Published: 11/29/2007
• Est. Priority Date: 01/27/2005
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: WEIDMAN, Timothy
• Application Number:
  US11/837,375
• Publication Number:
  US 20070271751A1
• Time in Patent Office: Days
• US Class Current: 29/25.30
• CPC Class Codes: C23C 16/06 characterised by the deposition of metallic material
• CPC Class Codes: C23C 16/4488 by in situ generation of reactive gas by chemical or electrochemical reaction
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]
• CPC Class Codes: C23C 16/45536 Use of plasma, radiation or electromagnetic fields
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01G 11/46 Metal oxides
• CPC Class Codes: H01G 11/86 specially adapted for electrodes carbonisation or activation of carbon for the manufacture of electrodes H01G11/34
• CPC Class Codes: Y02E 60/13 Energy storage using capacitors

Abstract

The present invention generally relates to the method of creating a reliable and cost efficient electrochemical capacitor electrode that has an improved lifetime, lower production cost and improved process performance. The invention generally includes treating or conditioning an electrode surface by depositing a ruthenium containing layer, or layers, having good adhesion to the substrate, low electrical resistivity (high conductivity) and has good resistance to chemical attack during the operation of electrochemical capacitor. One aspect of the invention discussed herein is a method of forming an electrode by depositing a ruthenium containing layer at relatively low temperatures, such as <180° C.

Claims

1. A method of forming an electrochemical capacitor, comprising:

providing a first substrate that has a surface that is adapted to form a portion of an electrode in an electrochemical capacitor; and

depositing a ruthenium dioxide coating on the surface of the first substrate, wherein the ruthenium dioxide coating is deposited using ruthenium tetroxide.

2. The method of claim 1, wherein the first substrate is maintained at a temperature between about 20°

C. and about 180°

C. when depositing a ruthenium dioxide layer.

3. The method of claim 1, wherein the ruthenium dioxide coating on the surface of the substrate is formed using a gas comprising ruthenium tetroxide.

4. The method of claim 1, further comprising:

providing a second substrate that has a surface that is adapted to form a portion of an electrode in the electrochemical capacitor;

depositing a ruthenium dioxide coating on the surface of the second substrate, wherein the ruthenium dioxide coating is deposited using ruthenium tetroxide; and

disposing a membrane and an electrolyte between the ruthenium dioxide coating on the first substrate and the ruthenium dioxide coating on the second substrate.

5. The method of claim 1, wherein the membrane comprises a material selected from a group consisting of polyethylene, glass, carbon, perfluoronated sulfonic acid polymer, sulphonated fluorocarbon polymer, and polybenzimidazole.

6. The method of claim 1, further comprising forming a layer on the surface of the first substrate before depositing the ruthenium dioxide coating, wherein the layer comprises oxides of ruthenium, and oxides of titanium, oxides of zinc, or oxides of tin.

7. The method of claim 6, wherein the layer is formed by sequentially exposing the surface to a ruthenium containing gas and a precursor, wherein the precursor comprises titanium, zinc, or tin.

8. A method of forming an electrochemical capacitor, comprising:

positioning a substrate that has a surface that is adapted to form a portion of a porous electrode in an electrochemical capacitor in a processing region of a processing chamber;

forming a gas comprising ruthenium tetroxide in a first vessel;

transferring an amount of the gas to the surface of the substrate to form a ruthenium containing layer thereon.

9. A method of claim 8, wherein the substrate is disposed on a substrate support that is maintained at a temperature between about 20°

C. and about 180°

C.

10. A method of claim 8, wherein forming a ruthenium tetroxide containing gas comprises:

forming an ozone containing gas; and

delivering the ozone containing gas to a surface of a ruthenium containing material positioned in the first vessel.

11. A method of claim 8, wherein the ruthenium containing material is a material selected from a group consisting of metallic ruthenium, sodium perruthenate or potassium perruthenate.

12. A method of forming an electrochemical capacitor, comprising:

positioning a substrate that has a surface that is adapted to form a portion of a porous electrode in an electrochemical capacitor in a processing region of a processing chamber;

forming a process gas comprising ruthenium tetroxide in a first vessel;

transferring at least a portion of the process gas from the first vessel to a second vessel;

removing unwanted contaminants contained in the second vessel; and

delivering an the ruthenium tetroxide from the second vessel to the substrate positioned on a substrate support in the processing region to form a ruthenium containing layer on a surface of the substrate.

13. The method of claim 12, wherein the step of removing unwanted contaminants further comprises:

receiving an amount of the process gas from the first vessel;

collecting a desired amount of ruthenium tetroxide from the process gas on a surface of the second vessel that is maintained at a first temperature; and

purging the second vessel with a purge gas to remove contaminants from the second vessel after collecting a desired amount of ruthenium tetroxide; and

vaporizing a desired amount of the ruthenium tetroxide found on the surface of the second vessel.

14. The method of claim 13, wherein the first temperature of the surface is between about −

20°

C. and about 25°

C.

15. A method of claim 13, wherein the vaporizing step comprises:

heating the surface of the second vessel to a second temperature between about 0°

C. and about 25°

C.

16. A method of claim 12, wherein the processing region is adapted to process a substrate at a processing pressure between about 0.1 mtorr and about 50 Torr.

17. A method of forming an electrochemical capacitor, comprising:

providing a substrate that has a surface that is adapted to form a portion of a porous electrode in an electrochemical capacitor;

providing an aqueous solution that comprises a ruthenium metal, water and a hypochlorite containing material;

adding an amount of an acid to the aqueous solution;

separating the ruthenium tetroxide from the aqueous solution; and

delivering the ruthenium tetroxide to the substrate positioned on a substrate support in a processing chamber.

18. A method of claim 17, wherein the substrate support is maintained at a temperature between about 20°

C. and about 180°

C.

19. A method of claim 17, wherein the perruthenate material is selected from a group consisting of sodium perruthenate or potassium perruthenate.

20. A method of claim 17, wherein the solvent is selected from a group consisting of perfluorocarbons, hydroflurocarbons, or chlorofluorocarbons.