ANGULAR RATE SENSOR
First Claim
1. An angular rate sensor formed into a planar shape and configured to detect an angular rate around a first axis in the plane, the angular rate sensor comprising:
- a rotating oscillator rotatably supported in the plane and around the rotational axis in a direction of a second axis perpendicular to the first axis;
vibration generating means which rotationally vibrates the rotating oscillator; and
a first detecting oscillator and a second detecting oscillator which are disposed inside the rotating oscillator and separately on the right side and the left side of the rotational axis, and which are supported as being displaceable in a direction of the second axis, wherein a first detecting unit and a second detecting unit, which detect vibrations of the respective first and second detecting oscillators in the direction of the second axis due to the Coriolis force, are respectively provided closer to the rotational axis than the first and second detecting oscillators are.
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Abstract
An angular rate sensor formed into a planar shape, which detects an angular rate around a first axis in the plane, includes a rotating oscillator rotatably supported in the plane and around the rotational axis in a direction of a second axis perpendicular to the first axis; vibration generating means which rotationally vibrates the rotating oscillator; and a first detecting oscillator and a second detecting oscillator which are disposed inside the rotating oscillator and separately on the right side and the left side of the rotational axis, and which are supported as being displaceable in a direction of the second axis. A first detecting unit and a second detecting unit, which detect vibrations of the respective first and second detecting oscillators in the direction of the second axis due to the Coriolis force, are respectively provided closer to the rotational axis than the first and second detecting oscillators are.
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Citations
23 Claims
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1. An angular rate sensor formed into a planar shape and configured to detect an angular rate around a first axis in the plane, the angular rate sensor comprising:
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a rotating oscillator rotatably supported in the plane and around the rotational axis in a direction of a second axis perpendicular to the first axis;
vibration generating means which rotationally vibrates the rotating oscillator; and
a first detecting oscillator and a second detecting oscillator which are disposed inside the rotating oscillator and separately on the right side and the left side of the rotational axis, and which are supported as being displaceable in a direction of the second axis, wherein a first detecting unit and a second detecting unit, which detect vibrations of the respective first and second detecting oscillators in the direction of the second axis due to the Coriolis force, are respectively provided closer to the rotational axis than the first and second detecting oscillators are. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A multiaxial detection type angular rate sensor comprising a first sensor unit and a second sensor unit which include an angular rate sensor formed into a planar shape and configured to detect an angular rate around a first axis in the plane, the angular rate sensor comprising:
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a rotating oscillator rotatably supported in the plane and around the rotational axis in a direction of a second axis perpendicular to the first axis;
vibration generating means which rotationally vibrates the rotating oscillator; and
a first detecting oscillator and a second detecting oscillator which are disposed inside the rotating oscillator and separately on the right side and the left side of the rotational axis, and which are supported as being displaceable in a direction of the second axis, wherein a first detecting unit and a second detecting unit, which detect vibrations of the respective first and second detecting oscillators in the direction of the second axis due to the Coriolis force, are respectively provided closer to the rotational axis than the first and second detecting oscillators are, the first sensor unit and the second sensor unit are disposed perpendicular to each other, the first sensor unit detects an angular rate around the first axis and the second sensor unit detects an angular rate around the second axis. - View Dependent Claims (23)
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Specification