Airway adaptor with optical pressure transducer and method of manufacturing a sensor component
First Claim
1. An airway adapter comprising:
- (a) a housing comprising;
(i) a flow path,(ii) a first pressure port that communicates with the flow path, and(iii) a second pressure port that communicates with the flow path, wherein the first pressure port is spaced apart from the second pressure port;
(b) a flow restriction disposed in the flow path between the first and second pressure ports and that creates a pressure differential therebetween; and
(c) a pressure transducer that generates a signal that reflects the differential pressure created by the flow restriction between the first and second pressure ports, wherein the pressure transducer comprises an optical interferometer.
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Accused Products
Abstract
An airway adapter that comprises a housing and a pressure transducer. The housing comprises a flow path having a first end and a second end, a first pressure port that communicates with the flow path, and a second pressure port that communicates with the flow path. The first pressure port is spaced apart from the second pressure port. The flow restriction is disposed in the flow path between the first and second pressure ports that creates a pressure differential therebetween. The pressure transducer generates a signal that reflects the differential pressure created by the flow restriction between the first and second pressure ports, wherein the pressure transducer comprises an optical interferometer.
50 Citations
24 Claims
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1. An airway adapter comprising:
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(a) a housing comprising; (i) a flow path, (ii) a first pressure port that communicates with the flow path, and (iii) a second pressure port that communicates with the flow path, wherein the first pressure port is spaced apart from the second pressure port; (b) a flow restriction disposed in the flow path between the first and second pressure ports and that creates a pressure differential therebetween; and (c) a pressure transducer that generates a signal that reflects the differential pressure created by the flow restriction between the first and second pressure ports, wherein the pressure transducer comprises an optical interferometer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An airway adapter comprising:
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(a) a housing comprising; (i) a flow path, (ii) a first pressure port that communicates with the flow path, and (iii) a second pressure port that communicates with the flow path, wherein the first pressure port is spaced apart from the second pressure port; (b) a pressure transducer that generates a signal that reflects a pressure differential created between the first pressure port and the second pressure port; and (c) a channel formed within the housing that communicates the first pressure port with the second pressure port, wherein the pressure transducer comprises a diaphragm disposed within the housing and communicating with the channel, the channel being formed proximate to an outer surface of the flow path. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method of manufacturing an interferometer comprising:
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coating a substrate with a first layer of a first material, the first layer being at least partially transmissive and at least partially reflective for electromagnetic radiation within a wavelength range; coating the first layer with a layer of photoresist; coating the layer of photoresist with a second layer of a second material, the second layer being substantially reflective for electromagnetic radiation with the wavelength range; exposing the photoresist to patterned electromagnetic radiation, the patterned electromagnetic radiation having a wavelength within the wavelength range; and
wherein the photoresist exposed to electromagnetic radiation is developed to form one or more spacers; andremoving undeveloped photoresist from between the first layer and the second layer such that the spacers support the first layer and the second layer apart from one another to create a space between the first layer and the second layer. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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Specification