PROCESS CHAMBER FOR DIELECTRIC GAPFILL
First Claim
1. A system to form a dielectric layer on a substrate from a plasma of dielectric precursors, the system comprising:
- a deposition chamber;
a substrate stage in the deposition chamber to hold the substrate;
a remote plasma generating system coupled to the deposition chamber, wherein the plasma generating system is used to generate a first dielectric precursor comprising a reactive radical;
a precursor distribution system comprising a dual-channel showerhead positioned above the substrate stage, wherein the showerhead comprises a faceplate with a first set of openings through which the reactive radical precursor enters the deposition chamber, and a second set of openings through which a second dielectric precursor enters the deposition chamber, and wherein the precursors are not mixed until entering the deposition chamber.
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Abstract
A system to form a dielectric layer on a substrate from a plasma of dielectric precursors is described. The system may include a deposition chamber, a substrate stage in the deposition chamber to hold the substrate, and a remote plasma generating system coupled to the deposition chamber, where the plasma generating system is used to generate a dielectric precursor having one or more reactive radicals. The system may also include a precursor distribution system comprising a dual-channel showerhead positioned above the substrate stage. The showerhead may have a faceplate with a first set of openings through which the reactive radical precursor enters the deposition chamber, and a second set of openings through which a second dielectric precursor enters the deposition chamber. An in-situ plasma generating system may also be included to generate the plasma in the deposition chamber from the dielectric precursors supplied to the deposition chamber.
312 Citations
24 Claims
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1. A system to form a dielectric layer on a substrate from a plasma of dielectric precursors, the system comprising:
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a deposition chamber;
a substrate stage in the deposition chamber to hold the substrate;
a remote plasma generating system coupled to the deposition chamber, wherein the plasma generating system is used to generate a first dielectric precursor comprising a reactive radical;
a precursor distribution system comprising a dual-channel showerhead positioned above the substrate stage, wherein the showerhead comprises a faceplate with a first set of openings through which the reactive radical precursor enters the deposition chamber, and a second set of openings through which a second dielectric precursor enters the deposition chamber, and wherein the precursors are not mixed until entering the deposition chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A system to form a dielectric layer on a substrate from a plasma of dielectric precursors, the system comprising:
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a deposition chamber;
a substrate stage in the deposition chamber to hold the substrate, wherein the substrate stage is operable to rotate during the deposition of the dielectric layer;
a remote plasma generating system coupled to the deposition chamber, wherein the plasma generating system is used to generate a dielectric precursor comprising a reactive radical;
a precursor distribution system comprising a dual-channel showerhead positioned above the substrate stage, wherein the showerhead comprises a faceplate with a first set of openings through which the reactive radical precursor enters the deposition chamber, and a second set of openings through which a second dielectric precursor enters the deposition chamber, and wherein the precursors are not mixed until entering the deposition chamber; and
an in-situ plasma generating system to generate the plasma in the deposition chamber from the dielectric precursors supplied to the deposition chamber. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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Specification