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Multi-channel low coherence interferometer

  • US 20070278389A1
  • Filed: 06/02/2006
  • Published: 12/06/2007
  • Est. Priority Date: 06/02/2006
  • Status: Active Grant
First Claim
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1. A system for determining a characteristic of a sample, the system comprising:

  • a light source for providing a light;

    a splitter receptive to said light from said light source to produce a sensing light portion and a reference light portion;

    a sensing light path comprising,a light path configured to communicate said sensing light portion from said splitter and said sensing light portion reflected from the sample,a plurality of probe light paths configured to direct said sensing light portion at the sample and to receive said sensing light portion reflected from the sample,an optical switch selectable to define communication between said light path and a selected at least one of said probe light paths; and

    means for increasing and decreasing the effective light path length of said sensing light path;

    a reflecting device;

    a reference light path configured to communicate said reference light portion from said splitter, said reference light path further configured to direct said reference light portion at said reflecting device and to receive said reference light portion reflected from said reflecting device;

    means for increasing and decreasing the effective light path length of said reference light path;

    wherein said means for increasing and decreasing the effective light path length of said sensing light path and said means for increasing and decreasing the effective light path length of said reference light path are configured such that when one of said means is increasing the other of said means is decreasing;

    wherein said means for increasing and decreasing the effective light path length of said sensing light path and said means for increasing and decreasing the effective light path length of said reference light path are increased and decreased to obtain an effective light path length difference between the effective light path lengths of said sensing light path and said reference light path within about a coherence length of said light;

    a detector receptive to said sensing light portion reflected from the sample and said reference light portion reflected from said reflecting device, said detector generating a signal indicative of an interference of said sensing light portion reflected from the sample and said reference light portion reflected from said reflecting device; and

    processing means configured to determine a characteristic of the sample from said signal indicative of said interference of said sensing light portion reflected from the sample and said reference light portion reflected from said reflecting device.

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