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Substrate, substrate inspecting method and methods of manufacturing an element and a substrate

  • US 20070278485A1
  • Filed: 06/01/2007
  • Published: 12/06/2007
  • Est. Priority Date: 06/01/2006
  • Status: Abandoned Application
First Claim
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1. A substrate inspection method comprising the steps of:

  • preparing a substrate provided at its main surface with a plurality of layers;

    forming an opening at the main surface of said substrate by removing at least partially said plurality of layers in a region provided with said plurality of layers; and

    performing an inspection on said layer exposed in said opening.

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