Substrate, substrate inspecting method and methods of manufacturing an element and a substrate
First Claim
1. A substrate inspection method comprising the steps of:
- preparing a substrate provided at its main surface with a plurality of layers;
forming an opening at the main surface of said substrate by removing at least partially said plurality of layers in a region provided with said plurality of layers; and
performing an inspection on said layer exposed in said opening.
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Accused Products
Abstract
A substrate inspection method allowing inspection of all a plurality of substrates each provided at its surface with a plurality of layers by determining quality of the plurality of layers as well as methods of manufacturing the substrate and an element using the substrate inspection method are provided. The substrate inspection method includes a step of preparing the substrate provided at its main surface with the plurality of layers, a film forming step, a local etching step, and an inspection step or a composition analysis step. In the step, a concavity is formed in a region provided with an epitaxial layer of the main surface of the substrate by removing at least partially the epitaxial layer. In the inspection step, the inspection is performed on the layer exposed in the concavity.
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Citations
12 Claims
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1. A substrate inspection method comprising the steps of:
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preparing a substrate provided at its main surface with a plurality of layers; forming an opening at the main surface of said substrate by removing at least partially said plurality of layers in a region provided with said plurality of layers; and performing an inspection on said layer exposed in said opening. - View Dependent Claims (2, 3, 4)
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5. A method of manufacturing a substrate, comprising the steps of:
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preparing a substrate; forming a plurality of layers on a main surface of said substrate; inspecting the substrate provided with said plurality of layers, said step of inspecting the substrate including the steps of; forming an opening at the main surface of said substrate by removing at least partially said plurality of layers in a region provided with said plurality of layers, and performing an inspection on said layer exposed in said opening; and removing said plurality of layers from said substrate determined not to satisfy a predetermined criterion according to a result of the inspection in said step of inspecting the substrate, wherein said step of forming said plurality of layers includes reformation of the plurality of layers on the main surface of said substrate previously subjected to removal of said plurality of layers in said step of removing said plurality of layers. - View Dependent Claims (6, 7, 8, 9)
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10. A substrate provided at its main surface with a plurality of layers, wherein
an opening is formed at the main surface of said substrate by removing at least partially said plurality of layers in a region provided with said plurality of layers.
Specification