WAFER STORAGE CONTAINER

• US 20070284282A1
• Filed: 06/01/2007
• Published: 12/13/2007
• Est. Priority Date: 06/07/2006
• Status: Active Grant

• Current Assignee: Shin-Etsu Polymer Company Limited (Shin-Etsu Chemical Company Limited)
• Original Assignee: Shin-Etsu Polymer Company Limited (Shin-Etsu Chemical Company Limited)
• Inventors: Yajima, Toshitsugu, Kamada, Toshiyuki
• Granted Patent: US 7,530,462 B2
• Time in Patent Office: Days
• US Class Current: 206/710
• CPC Class Codes: H01L 21/67346 characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports

Abstract

A wafer storage container includes an outer peripheral portion located outside an outer peripheral edge of a wafer, and a placing portion which extends from a position lower than an uppermost surface of the outer peripheral portion to a radial inside of the wafer and on which the wafer is placed at a position lower than the uppermost surface of the outer peripheral portion. The placing portion includes a first inclined surface which descends toward the radial inside of the wafer and can be brought into contact with only the outer peripheral edge of the wafer when the wafer is placed and a second inclined surface which is on a rear side of the first inclined surface, ascends toward the radial inside of the wafer, and can be brought into contact with only the outer peripheral edge of a lower wafer when a plurality of wafer storage containers are stacked.

Claims

1. A wafer storage container comprising:

an outer peripheral portion located outside an outer peripheral edge of a wafer; and

a placing portion which extends from a position lower than an uppermost surface of the outer peripheral portion to the inside of the wafer in the radial direction and on which the wafer is placed at a position lower than the uppermost surface of the outer peripheral portion, wherein

the placing portion has a first inclined surface which descends toward the inside of the wafer in the radial direction and can be brought into contact with only the outer peripheral edge of the wafer when the wafer is placed and a second inclined surface which is on a rear side of the first inclined surface, ascends toward the inside of the wafer in the radial direction, and can be brought into contact with only the outer peripheral edge of a lower wafer when a plurality of wafer storage containers are stacked.

2. The wafer storage container according to claim 1, wherein

an outer peripheral portion has a plurality of projecting portions projecting upward and arranged on an upper surface of the outer peripheral portion at predetermined intervals, and

a first inclined surface is connected to a wafer from both the projecting portions and a recessed portion between the projecting portions to make it possible to horizontally hold the wafer at the same level when the wafer is placed.

3. The wafer storage container according to claim 1, wherein a wafer storage container has a ring-like shape having a through hole at the center.

4. The wafer storage container according to claim 2, wherein a wafer storage container has a ring-like shape having a through hole at the center.

5. The wafer storage container according to claim 1, wherein a placing portion has a plurality of notch grooves obtained by notching the placing portion along a circumferential direction.

6. The wafer storage container according to claim 2, wherein a placing portion has a plurality of notch grooves obtained by notching the placing portion along a circumferential direction.

7. The wafer storage container according to claim 3, wherein a placing portion has a plurality of notch grooves obtained by notching the placing portion along a circumferential direction.

8. The wafer storage container according to claim 4, wherein a placing portion has a plurality of notch grooves obtained by notching the placing portion along a circumferential direction.

9. The wafer storage container according to claim 1, wherein a mark to indicate an orientation of a wafer is provided on the wafer storage container.

10. The wafer storage container according to claim 2, wherein a mark to indicate an orientation of a wafer is provided on the wafer storage container.

11. The wafer storage container according to claim 3, wherein a mark to indicate an orientation of a wafer is provided on the wafer storage container.

12. The wafer storage container according to claim 4, wherein a mark to indicate an orientation of a wafer is provided on the wafer storage container.

13. The wafer storage container according to claim 5, wherein a mark to indicate an orientation of a wafer is provided on the wafer storage container.

14. The wafer storage container according to claim 6, wherein a mark to indicate an orientation of a wafer is provided on the wafer storage container.

15. The wafer storage container according to claim 7, wherein a mark to indicate an orientation of a wafer is provided on the wafer storage container.

16. The wafer storage container according to claim 8, wherein a mark to indicate an orientation of a wafer is provided on the wafer storage container.