Microfabricated Devices and Method for Fabricating Microfabricated Devices
First Claim
1. A microfabricated device for operation in a fluid, comprising:
- a substrate having a first and second surface;
a first electrode material layer located over the first surface of the substrate;
a piezoelectric material layer located over the first electrode material layer;
a second electrode material layer located over the piezoelectric material layer; and
a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid.
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Accused Products
Abstract
Microfabricated devices for operation in a fluid that include a substrate that has a first and second surface and a first electrode material layer located over the first surface of the substrate. The devices have a piezoelectric material layer located over the first electrode material layer and a second electrode material layer located over the piezoelectric material layer. The devices also include a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. Some devices include a layer of conductive material located over the layer of isolation material.
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Citations
45 Claims
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1. A microfabricated device for operation in a fluid, comprising:
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a substrate having a first and second surface;
a first electrode material layer located over the first surface of the substrate;
a piezoelectric material layer located over the first electrode material layer;
a second electrode material layer located over the piezoelectric material layer; and
a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A microfabricated device for operation in a fluid, comprising:
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a substrate having a first insulating surface and a second surface;
a first electrode material layer located over the first surface of the substrate, the first electrode material layer having one or more electrodes;
a piezoelectric material layer located over the first electrode material layer; and
a second electrode material layer located over the piezoelectric material layer, the second electrode material layer functioning as an electrical ground plane and defining a fluid interface for the microfabricated device. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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27. A method for fabricating a microfabricated device for operation in a fluid, comprising:
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depositing a piezoelectric material layer over a first surface of a substrate;
creating an electrode material layer over the piezoelectric material layer; and
creating an isolation material layer over the electrode material layer that at least one of chemically or electrically isolates a portion of the electrode material layer from a fluid during operation of the microfabricated device. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A method for fabricating a microfabricated device for operation in a fluid, comprising:
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creating a first electrode material layer over a first surface of a substrate, the first electrode material layer having one or more electrodes;
depositing a piezoelectric material layer over the first electrode material layer; and
creating a second electrode material layer located over the piezoelectric material layer, the second electrode material layer functioning as an electrical ground plane and defining a fluid interface for the microfabricated device. - View Dependent Claims (40, 41, 42, 43, 44)
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45. A microfabricated device for operation in a fluid, comprising:
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a substrate having a first and second surface;
a first electrode material layer located over the first surface of the substrate;
a piezoelectric material layer located over the first electrode material layer;
a second electrode material layer located over the piezoelectric material layer; and
a means for at least one of chemically or electrically isolating the second electrode material layer from a fluid.
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Specification