Perpendicular magnetic recording medium and method of manufacturing the same
First Claim
1. A perpendicular magnetic recording medium, comprising:
- a substrate;
an adhesion layer;
an intermediate layer;
a perpendicular recording layer; and
a protective layer;
wherein the adhesion layer disposed between the intermediate layer and the substrate is formed by sputtering an alloy powder containing an intermetallic compound; and
the alloy powder is formed of two or more of metal elements having different melting points from each other, and has a melting point higher than that of a metal element having the lowest melting point among the two or more of metal elements having different melting points from each other.
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Abstract
Embodiments of the present invention improve the production efficiency of a perpendicular recording medium while ensuring the scratch resistance thereof. In order to realize high production stability in the high speed production of perpendicular recording media, a target is not provided with a texture of a low melting point or the ratio thereof is decreased. Thus according to one embodiment of the present invention, upon forming a layer having an element of a low melting point in the constituent layers of a perpendicular recording medium, a target can be made using an alloy powder previously formed of an intermetallic compound having a melting point higher than 660° C., thereby preventing thermal deformation.
26 Citations
20 Claims
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1. A perpendicular magnetic recording medium, comprising:
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a substrate;
an adhesion layer;
an intermediate layer;
a perpendicular recording layer; and
a protective layer;
wherein the adhesion layer disposed between the intermediate layer and the substrate is formed by sputtering an alloy powder containing an intermetallic compound; and
the alloy powder is formed of two or more of metal elements having different melting points from each other, and has a melting point higher than that of a metal element having the lowest melting point among the two or more of metal elements having different melting points from each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of manufacturing a perpendicular magnetic recording medium, the method comprising the steps of;
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forming a non-magnetic under layer on a substrate by sputtering;
forming an intermediate layer on the non-magnetic under layer;
forming a recording layer on the intermediate layer; and
forming a protective layer on the recording layer, wherein an intermetallic compound having a melting point higher than that of a first metal element formed by atomizing first and second metal elements having different melting points from each other is used as a target in the step of forming the non-magnetic under layer, and the melting point of the first metal element is lower than the melting point of the second metal element. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A perpendicular magnetic recording medium, comprising:
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a substrate;
an adhesion layer;
first and second soft magnetic layers anti-ferromagnetically coupled by way of a non-magnetic layer;
a non-magnetic layer;
a second soft magnetic layer;
an intermediate layer;
a perpendicular recording layer; and
a protective layer;
wherein the adhesion layer is disposed between the first soft magnetic layer and the substrate; and
the adhesion layer contains Al, oxygen, iron of 300 wt.ppm or more, and at least one or more of metal elements in the group consisting of Ti, Ni, Ta, Cr, Zr, Co, and Hf. - View Dependent Claims (20)
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Specification