Methods and Systems for Detecting Defects on a Specimen Using a Combination of Bright Field Channel Data and Dark Field Channel Data

• US 20070286473A1
• Filed: 06/08/2006
• Published: 12/13/2007
• Est. Priority Date: 06/08/2006
• Status: Active Grant

• Current Assignee: Kla-Tencor Technologies Corporation (KLA Corporation)
• Original Assignee: Kla-Tencor Technologies Corporation (KLA Corporation)
• Inventors: Kulkarni, Ashok, Leslie, Brian
• Granted Patent: US 7,711,177 B2
• Time in Patent Office: Days
• US Class Current: 382/146
• CPC Class Codes: G01N 2021/8825 Separate detection of dark field and bright field
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

Various methods, carrier media, and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data are provided. One computer-implemented method includes combining pixel-level data acquired for the specimen by a bright field channel and a dark field channel of an inspection system. The method also includes detecting defects on the specimen by applying a two-dimensional threshold to the combined data. The two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.

Claims

1. A computer-implemented method for detecting defects on a specimen, comprising:

combining pixel-level data acquired for the specimen by a bright field channel and a dark field channel of an inspection system; and

detecting defects on the specimen by applying a two-dimensional threshold to the combined data, wherein the two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.

2. The method of claim 1, wherein the data is further acquired by the bright field channel and the dark field channel in the deep ultraviolet spectrum.

3. The method of claim 1, wherein said applying the two-dimensional threshold results in a signal-to-noise ratio for said detecting that is higher than a signal-to-noise ratio for detecting the defects by applying the threshold for the data acquired by the bright field channel to the pixel-level data acquired by the bright field channel and by applying the threshold for the data acquired by the dark field channel to the pixel-level data acquired by the dark field channel.

4. The method of claim 1, wherein the defects detected using the two-dimensional threshold comprise fewer nuisance defects than defects detected by applying the threshold for the data acquired by the bright field channel to the pixel-level data acquired by the bright field channel and by applying the threshold for the data acquired by the dark field channel to the pixel-level data acquired by the dark field channel.

5. The method of claim 1, further comprising generating the pixel-level data by subtracting bright field reference data from raw data acquired by the bright field channel and subtracting dark field reference data from raw data acquired by the dark field channel.

6. The method of claim 1, further comprising classifying the defects using one or more characteristics of the combined data corresponding to the defects, one or more characteristics of patterned features formed on the specimen proximate to the defects determined from the pixel-level data acquired by the bright field channel, one or more characteristics of the patterned features formed on the specimen proximate to the defects determined from the pixel-level data acquired by the dark field channel, or some combination thereof.

7. The method of claim 1, further comprising altering the threshold for the data acquired by the bright field or dark field channel based on the pixel-level data acquired by the dark field or bright field channel, respectively.

8. The method of claim 1, further comprising using the pixel-level data acquired by the bright field channel to align the pixel-level data acquired by the bright field channel to design data for the specimen and altering the threshold for the data acquired by the bright field channel based on the design data.

9. The method of claim 1, further comprising using the pixel-level data acquired by the bright field channel to align the pixel-level data acquired by the dark field channel to design data for the specimen and altering the threshold for the data acquired by the dark field channel based on the design data.

10. The method of claim 1, further comprising identifying patterned features on the specimen using the pixel-level data acquired by the bright field channel, separating the data acquired by the dark field channel into different segments based on the patterned features, and altering the threshold for the data acquired by the dark field channel for the different segments based on the patterned features.

11. The method of claim 1, further comprising identifying patterned features on the specimen using the pixel-level data acquired by the dark field channel, separating the data acquired by the bright field channel into different segments based on the patterned features, and altering the threshold for the data acquired by the bright field channel for the different segments based on the patterned features.

12. The method of claim 1, wherein the pixel-level data acquired by the bright field channel comprises image data, the method further comprising comparing the image data to reference templates corresponding to different regions of the specimen to determine if the reference templates match the image data and using the image data matched to the reference templates to determine portions of the pixel-level data acquired by the dark field channel that correspond to the different regions.

13. The method of claim 1, wherein the pixel-level data acquired by the bright field channel and the dark field channel comprises image data, the method further comprising aligning the image data acquired by the bright field channel to the image data acquired by the dark field channel and using the aligned image data to identify the defects that are real defects and the defects that are nuisance events.

14. The method of claim 13, wherein the pixel-level data is further acquired by the bright field channel and the dark field channel for process window qualification.

15. The method of claim 1, further comprising clustering the combined data into different groups based on one or more characteristics of the combined data.

16. The method of claim 15, wherein said detecting comprises applying different values of the two-dimensional threshold to the different groups.

17. The method of claim 1, wherein the pixel-level data acquired by the bright field channel and the dark field channel comprises image data, the method further comprising clustering the combined data into different groups based on one or more features extracted from the image data.

18. The method of claim 17, wherein said detecting comprises applying different values of the two-dimensional threshold to the different groups.

19. The method of claim 1, further comprising determining a size of the defects using the pixel-level data acquired by the bright field channel or the dark field channel and filtering the defects based on the size.

20. The method of claim 1, wherein said detecting is performed for one region of a die formed on the specimen, the method further comprising detecting the defects in a different region of the die on the specimen by applying the threshold for the data acquired by the bright field channel or the dark field channel to the pixel-level data acquired by the bright field channel or the dark field channel, respectively.

21. A carrier medium, comprising program instructions executable on a computer system for performing a method for detecting defects on a specimen, wherein the method comprises:

combining pixel-level data acquired for the specimen by a bright field channel and a dark field channel of an inspection system; and

detecting defects on the specimen by applying a two-dimensional threshold to the combined data, wherein the two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.

22. A system configured to detect defects on a specimen, comprising:

an inspection system comprising a bright field channel and a dark field channel, wherein the bright field channel and the dark field channel are configured to acquire pixel-level data for the specimen; and

a processor configured to;

combine the pixel-level data acquired for the specimen by the bright field channel and the dark field channel; and

detect defects on the specimen by applying a two-dimensional threshold to the combined data, wherein the two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.