Microfluidic Device
First Claim
1. A microfluidic device, comprising:
- a) a first and a second substrate;
b) a fluid channel;
c) at least a channel and one or more fluid ports etched in the first and/or second substrates;
d) a first layer deposited on a surface of the second substrate, from which the first layer is partially removed in accordance with a predefined geometry; and
e) a second layer deposited on top of the first layer and the surface of the second substrate;
wherein the first substrate is aligned relative to the surface of the second substrate and thereafter bonded therewith, and wherein the first layer is arranged relative to the channel so as to influence the transport or the properties of the fluid in the channel.
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Abstract
The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; and g) bonding the first substrate on the planarized second layer of the second substrate.
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Citations
19 Claims
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1. A microfluidic device, comprising:
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a) a first and a second substrate;
b) a fluid channel;
c) at least a channel and one or more fluid ports etched in the first and/or second substrates;
d) a first layer deposited on a surface of the second substrate, from which the first layer is partially removed in accordance with a predefined geometry; and
e) a second layer deposited on top of the first layer and the surface of the second substrate;
wherein the first substrate is aligned relative to the surface of the second substrate and thereafter bonded therewith, and wherein the first layer is arranged relative to the channel so as to influence the transport or the properties of the fluid in the channel. - View Dependent Claims (2)
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3. A microfluidic device, comprising:
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a) a first and a second substrate;
b) a fluid channel;
c) at least a channel and one or more fluid ports etched in the first and/or second substrates;
d) a first layer deposited on a surface of the second substrate, from which the first layer is partially removed in accordance with a predefined geometry; and
e) a second layer deposited on top of the first layer and the surface of the second substrate;
wherein the first substrate is aligned relative to the surface of the second substrate and thereafter bonded therewith, and wherein at least a part of the first layer is arranged relative to the channel so as to form, in operational state, a detector for detecting the transport and/or the properties of the fluid in the channel. - View Dependent Claims (4, 5, 6)
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7. A microfluidic device, comprising:
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a) a first and a second substrate;
b) a fluid channel;
c) at least a channel and one or more fluid ports etched in the first and/or second substrates;
d) a first layer deposited on a surface of the second substrate, from which the first layer is partially removed in accordance with a predefined geometry; and
e) a second layer deposited on top of the first layer and the surface of the second substrate;
wherein the first substrate is aligned relative to the surface of the second substrate and thereafter bonded therewith, and wherein the first layer is partly exposed to the channel, the exposed parts forming electrodes for providing an electrical field to generate an electro osmotic flow of the liquid in the channel. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A microfluidic device, comprising:
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a) a substrate provided with a fluid channel; and
b) a plurality of electro osmotic flow drive sections for providing electro osmotic flow in the channel, each drive section comprising electric field electrodes, exposed to the channel, and one or more gate electrodes, separated from the channel by an insulating layer, wherein the electrodes of each drive section can be controlled by control means so as to control the direction of the electro osmotic flow in the channel. - View Dependent Claims (14, 15, 16, 17)
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- 18. A microfluidic device, comprising a substrate provided with a fluid channel, electric field electrodes, exposed to the channel, and one or more gate electrodes, separated from the channel by an insulating layer, for providing an electro osmotic flow of the fluid in the channel, wherein the device also comprises one or more heater elements that are positioned on or in at least one of the walls of the channel for changing the temperature of the fluid in the channel.
Specification