Power Over Ethernet (Poe) - Based Measurement System

• US 20070288125A1
• Filed: 06/09/2006
• Published: 12/13/2007
• Est. Priority Date: 06/09/2006
• Status: Abandoned Application

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Quaratiello, Mark J.
• Application Number:
  US11/423,305
• Publication Number:
  US 20070288125A1
• Time in Patent Office: Days
• US Class Current: 700/282
• CPC Class Codes: H04L 12/10 Current supply arrangements
• CPC Class Codes: H04L 43/00 Arrangements for monitoring or testing data switching networks

Abstract

Ethernet-enabled measurement systems are disclosed that are POE compatible. The measurement systems are configured to measure a physical variable, and to generate and communicate data representative of the measured physical variable. The physical variable may include, but is not limited to, fluid pressure, fluid flow rate, and fluid flow ratio. The POE compatible measurement systems are configured to communicate the data through a POE-capable cable over an Ethernet network in accordance with Ethernet networking protocol. The measurement systems are further configured to receive power through the same POE-capable cable from a power source connected to the Ethernet network.

Claims

1. An apparatus comprising:

a sensor configured to measure a physical variable, and to generate data representative of the measured physical variable; and

an Ethernet cable connectable to the sensor, the Ethernet cable having POE (power over Ethernet) capability so as to both transmit the data from the sensor over an Ethernet network and also deliver power to the sensor from a power source connected to the Ethernet network.

2. The apparatus of claim 1, further comprising a communications processor configured to process the data so that the data can be communicated through the Ethernet cable over the Ethernet network in accordance with Ethernet networking protocol.

3. The apparatus of claim 1, wherein the cable is configured to deliver power to the sensor in accordance with the IEEE802.3af standard.

4. The apparatus of claim 1, wherein the Ethernet cable comprises at least one of:

a CAT3 cable;

a CAT5 cable;

a CAT5e cable; and

a CAT6 cable.

5. The apparatus of claim 1,

wherein the Ethernet cable comprises a plurality N of twisted pair wires and an RJ45 jack connector containing a corresponding plurality N of pins i (i=1, . . . N);

wherein each of the N twisted pair wires is couplable to a corresponding one of the N pins i of the RJ45 jack connector; and

wherein each of the N twisted pair wires is configured to carry at least one of;

data from the sensor; and

power from the power source.

6. The apparatus of claim 5,

wherein N=8, and the plurality N of wires comprise four pairs of twisted pair wires;

wherein two out of the four pairs of twisted pair wires are configured to carry data from the sensor over the Ethernet, and the remaining two out of the four pairs are configured to deliver power from the power source to the sensor over the Ethernet.

7. The apparatus of claim 5,

wherein the two pairs of twisted pair wires that are configured to carry data from the sensor are couplable to pins 1, 2, 3, and 6 of the RJ45 jack connector;

and

wherein the two pairs of twisted pair wired that are configured to carry power from the power source are couplable to pins 4,5, 7, and 8 of the RJ45 jack connector.

8. The apparatus of claim 5,

wherein the two pairs of twisted pair wires that are configured to carry data from the sensor are couplable to pins 1, 2, 3, and 6 of the RJ45 jack connector;

and

wherein the two pairs of twisted pair wired that are configured to carry power from the power source are also couplable to pins 1,2, 3, and 6 of the RJ45 jack connector.

9. The apparatus of claim 1 comprising a manometer, wherein the physical variable comprises pressure, and the sensor comprises a pressure sensor.

10. The apparatus of claim 9,

wherein the pressure sensor comprises a capacitance pressure transducer, and

wherein the capacitance pressure transducer comprises:

a deflectable diaphragm; and

a capacitance detecting circuit configured to detect a change in capacitance caused by a deflection of the diaphragm in response to a pressure applied thereto, the change in capacitance being a known function of the applied pressure.

11. The apparatus of claim 1 comprising a mass flow controller (MFC),

wherein the physical variable comprises a mass flow rate of a fluid, and the sensor comprises a mass flow sensor;

and

further comprising a controller configured to regulate the mass flow rate to a desired value.

12. The apparatus of claim 1 comprising a flow ratio controller (FRC),

wherein the physical variable comprises a ratio between two or more fluid flow rates;

wherein the sensor comprises a mass flow sensor configured to measure the two or more fluid flow rates and a flow ratio calculator configured to calculate the ratio between the measured fluid flow rates; and

further comprising a controller configured to control the ratio between the fluid flow rates to a desired value.

13. An apparatus for measuring a physical variable and for generating data representative of the measured physical variable,

wherein the apparatus is configured to communicate the data through a cable over an Ethernet network in accordance with Ethernet networking protocol, and

wherein the apparatus is further configured to receive power through the same cable from a power source connected to the Ethernet network.

14. The apparatus of claim 13, wherein the apparatus is POE compatible, and wherein the cable is a POE-capable cable that is able to both transmit the data over an Ethernet network, and also deliver power to the sensor from a power source connected to the Ethernet network.

15. The apparatus of claim 13, wherein the apparatus comprises at least one of:

an Ethernet-enabled digital process manometer (DPM) configured to measure a pressure;

an Ethernet-enabled mass flow controller (MFC) configured to measure a flow rate of a fluid, and including a controller configured to regulate the flow rate to a desired value;

an Ethernet-enabled mass flow verifier (MFV) configured to measure and verify a mass flow rate;

an Ethernet-enabled pressure controller (PC) configured to measure a pressure, and including a controller configured to regulate the pressure to a desired value; and

an Ethernet-enabled flow ratio controller (FRC) configured to measure two or more fluid flow rates, and including a controller for controlling the ratios between the fluid flow rates.

16. A method of generating data representative of measurements of a physical variable and communicating the data over the Ethernet, the method comprising:

measuring the physical variable and generating the data representing the measurements of the physical variable, using a sensor;

communicating the data over the Ethernet through an Ethernet cable; and

delivering power to the sensor through the same Ethernet cable.

17. The method of claim 16,

wherein the physical variable comprises at least one of:

a fluid pressure, a fluid flow rate, and a flow ratio between a plurality of fluid flow rates; and

wherein the sensor comprises at least one of;

a pressure sensor and a mass flow sensor.

18. The method of claim 17, wherein the Ethernet cable comprises at least one of a CAT3 cable, a CAT5 cable, a CAT5e cable, and a CAT6 cable, and wherein each of these cables is configured to provide power over Ethernet functionality.

19. The method of claim 16, wherein the act of delivering power to the sensor through the same Ethernet cable comprises delivering power to the sensor in accordance with the IEEE802.3af standard.