Lithography Processes Using Phase Change Compositions
First Claim
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1. A method comprising:
- A) filling a mold having a patterned surface with a phase change composition at a temperature above the phase change temperature of the phase change composition;
B) hardening the phase change composition to form a patterned feature;
C) separating the mold and the patterned feature;
optionally D) etching the patterned feature;
optionally E) cleaning the mold; and
optionally F) repeating steps A) to E) reusing the mold.
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Abstract
A lithography method includes the steps of: A) filling a mold having a patterned surface with a phase change composition at a temperature above the phase change temperature of the phase change composition; B) hardening the phase change composition to form a patterned feature; C) separating the mold and the patterned feature; optionally D) etching the patterned feature; optionally E) cleaning the mold; and optionally F) repeating steps A) to D) reusing the mold. The PCC may include an organofunctional silicone wax.
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Citations
12 Claims
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1. A method comprising:
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A) filling a mold having a patterned surface with a phase change composition at a temperature above the phase change temperature of the phase change composition;
B) hardening the phase change composition to form a patterned feature;
C) separating the mold and the patterned feature;
optionally D) etching the patterned feature;
optionally E) cleaning the mold; and
optionally F) repeating steps A) to E) reusing the mold. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification