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Lithography Processes Using Phase Change Compositions

  • US 20070290387A1
  • Filed: 09/23/2005
  • Published: 12/20/2007
  • Est. Priority Date: 10/08/2004
  • Status: Active Grant
First Claim
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1. A method comprising:

  • A) filling a mold having a patterned surface with a phase change composition at a temperature above the phase change temperature of the phase change composition;

    B) hardening the phase change composition to form a patterned feature;

    C) separating the mold and the patterned feature;

    optionally D) etching the patterned feature;

    optionally E) cleaning the mold; and

    optionally F) repeating steps A) to E) reusing the mold.

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