Area array modulation and lead reduction in interferometric modulators

• US 20070291347A1
• Filed: 01/03/2007
• Published: 12/20/2007
• Est. Priority Date: 12/09/2003
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Chui, Clarence, Kothari, Manish, Sampsell, Jeffrey
• Granted Patent: US 7,489,428 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 2300/06 Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
• CPC Class Codes: G09G 2310/0267 Details of drivers for scan electrodes, other than drivers for liquid crystal, plasma or OLED displays
• CPC Class Codes: G09G 2310/0297 Special arrangements with multiplexing or demultiplexing of display data in the drivers for data electrodes, in a pre-processing circuitry delivering display data to said drivers or in the matrix panel, e.g. multiplexing plural data signals to one D/A converter or demultiplexing the D/A converter output to multiple columns
• CPC Class Codes: G09G 3/2074 using sub-pixels
• CPC Class Codes: G09G 3/2081 with combination of amplitude modulation and time modulation space and time error diffusion G09G3/2066
• CPC Class Codes: G09G 3/3466 based on interferometric effect

Abstract

A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Claims

1. A method of operating a MEMS device, comprising:

receiving a first signal for a plurality of elements;

transmitting the first signal for a first predetermined period of time to some of the elements such that a first predetermined number of the elements are activated.

2. The method of claim 1, further comprising transmitting a second signal for a second predetermined period of time to some of the elements such that a second predetermined number of the elements are activated.

3. The method of claim 2, wherein the second predetermined period of time is greater than the first predetermined period of time and the second predetermined number is greater than the first predetermined number.

4. A MEMS device, comprising:

a plurality of elements having differing values of at least one of activation versus time and activation versus voltage; and

addressing lines configured to provide signals of at least one of selectable voltage and selectable time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.

5. The device of claim 4, wherein the addressing lines are configured to provide one signal for a row in the plurality of elements.

6. The device of claim 4, wherein the elements are bi-stable.

7. The device of claim 4, wherein the elements are light modulators.

8. The device of claim 4, wherein the elements comprise differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.

9. The device of claim 8, wherein the elements comprise at least one of differing mechanical support structure, differing film thicknesses, and residual stress.

10. The device of claim 4, wherein the elements have differing areas.

11. A MEMS device, comprising:

a plurality of elements having differing values of at least one of activation versus time and activation versus voltage; and

means for providing signals of at least one of varying voltage and varying time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.

12. The device of claim 11, wherein the providing means comprises addressing lines.

13. The device of claim 11, wherein the elements are light modulators.

14. The device of claim 11, wherein the elements comprise differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.

15. The device of claim 11, wherein the elements comprise at least one of differing mechanical support structure, differing film thicknesses, differing area and differing residual stress.

16. A method of manufacturing a MEMS device, the method comprising:

forming a plurality of elements having differing values of at least one of activation versus time and activation versus voltage; and

connecting addressing lines to the plurality of elements, wherein the addressing lines are configured to provide signals of at least one of selectable voltage and selectable time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.

17. The method of claim 16, wherein the addressing lines are configured to provide one signal for a row in the plurality of elements.

18. The method of claim 16, wherein the elements are bi-stable.

19. The method of claim 16, wherein the elements are light modulators.

20. The method of claim 16, further comprising forming elements of differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.

21. The method of claim 20, further comprising forming elements comprising at least one of differing mechanical support structure, differing film thicknesses, differing area and differing residual stress.