Conveying system

• US 20070292256A1
• Filed: 04/04/2007
• Published: 12/20/2007
• Est. Priority Date: 06/14/2006
• Status: Abandoned Application

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Murata Machinery Limited (Muratec)
• Inventors: Fukazawa, Hiroshi, Fukushima, Masazumi, Yamamoto, Makoto
• Application Number:
  US11/730,768
• Publication Number:
  US 20070292256A1
• Time in Patent Office: Days
• US Class Current: 414/792.8
• CPC Class Codes: H01L 21/67155 Apparatus for manufacturing or treating in a plurality of work-stations
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: H01L 21/67781 Batch transfer of wafers
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

The present invention provides a conveying system that enables the automation of handling of each tray, the handling of multiproduct small lots, and the improvement of conveying efficiency, while maintaining cleanliness. The conveying system has a tray loading and unloading means 20 for loading and unloading a plurality of stacked trays 1 into and from a pod 5 and a pod conveying means 10 for conveying the pod 5.

Claims

1. A conveying system characterized by comprising a tray loading and unloading means for loading and unloading a plurality of stacked trays into and from a pod and a pod conveying means for conveying the pod.

2. A conveying system according to claim 1, characterized by further comprising a tray conveying means for conveying the tray and a tray stacking and destacking means for stacking a plurality of the trays between the tray conveying means and the pod conveying means or destacking the plurality of stacked trays.

3. A conveying system according to claim 1, characterized in that the pod has a bottom lid on which a plurality of the stacked trays are placed, and the tray loading and unloading means elevates and lowers the bottom lid relative to a top shell of the pod.