Surface texture measuring instrument
First Claim
1. A surface texture measuring instrument, comprising:
- a measuring portion including a stylus having a contact portion that contacts a surface of a workpiece and a measuring force detecting unit that detects a measuring force when the contact portion contacts the surface of the workpiece;
a relative movement unit that relatively moves the measuring portion and the workpiece;
a position detecting unit that outputs as measuring point information a measuring point on which the workpiece is measured by the measuring portion, the measuring point information from the position detecting unit being collected while the relative movement unit is driven with the contact portion of the stylus contacting the surface of the workpiece, a surface texture of the workpiece being measured from the measuring point information,a scanning controller that collects a detection measuring force from the measuring portion and drives the relative movement unit such that the detection measuring force substantially coincides with a target measuring force;
a touch signal generating unit that collects the detection measuring force from the measuring portion and generates a touch signal when the detection measuring force coincides with a contact measuring force; and
a measurement value collecting unit that collects the measuring point information from the position detecting unit based on a predetermined condition when a fluctuation range of the detection measuring force from the measuring potion is within a preset certain range, the measurement value collecting unit collecting the measuring point information from the position detecting unit each time the touch signal is generated from the touch signal generating unit when the detection measuring force from the measuring portion oscillates and an oscillation range exceeds a preset certain range, when the scanning controller is in operation.
1 Assignment
0 Petitions
Accused Products
Abstract
A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12). The surface texture measuring instrument further includes: a scanning controller (54) that collects a detection signal from the force sensor (1) and drives the actuator such that the detecting signal coincides with a target measurement value; a touch signal generator (51) that generates a touch signal when the detection signal from the force sensor (1) coincides with the target measurement value; and a measurement value collecting unit (55) that collects a measurement value from a counter (26) at a predetermined time interval in a state where a fluctuation range of the detection signal from the force sensor (1) is within a preset range when a scanning controller is in operation, the latch counter (52) collecting a measurement value from a latch counter (52) each time the touch signal is generated in a state where the detection signal from the force sensor (1) oscillates and an amplitude exceeds the preset range.
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Citations
18 Claims
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1. A surface texture measuring instrument, comprising:
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a measuring portion including a stylus having a contact portion that contacts a surface of a workpiece and a measuring force detecting unit that detects a measuring force when the contact portion contacts the surface of the workpiece; a relative movement unit that relatively moves the measuring portion and the workpiece; a position detecting unit that outputs as measuring point information a measuring point on which the workpiece is measured by the measuring portion, the measuring point information from the position detecting unit being collected while the relative movement unit is driven with the contact portion of the stylus contacting the surface of the workpiece, a surface texture of the workpiece being measured from the measuring point information, a scanning controller that collects a detection measuring force from the measuring portion and drives the relative movement unit such that the detection measuring force substantially coincides with a target measuring force; a touch signal generating unit that collects the detection measuring force from the measuring portion and generates a touch signal when the detection measuring force coincides with a contact measuring force; and a measurement value collecting unit that collects the measuring point information from the position detecting unit based on a predetermined condition when a fluctuation range of the detection measuring force from the measuring potion is within a preset certain range, the measurement value collecting unit collecting the measuring point information from the position detecting unit each time the touch signal is generated from the touch signal generating unit when the detection measuring force from the measuring portion oscillates and an oscillation range exceeds a preset certain range, when the scanning controller is in operation. - View Dependent Claims (6, 8, 13, 16)
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2. A surface texture measuring instrument, comprising:
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a measuring portion including a stylus having a contact portion that contacts a surface of a workpiece and a measuring force detecting unit that detects a measuring force when the contact portion contacts the surface of the workpiece; a relative movement unit that relatively moves the measuring portion and the workpiece; a position detecting unit that outputs as measuring point information a measuring point on which the workpiece is measured by the measuring portion, the measuring point information from the position detecting unit being collected while the relative movement unit is driven with the contact portion of the stylus contacting the surface of the workpiece, a surface texture of the workpiece being measured from the measuring point information, a scanning controller that collects a detection measuring force from the measuring portion and drives the relative movement unit such that the detection measuring force substantially coincides with a target measuring force; a touch signal generating unit that collects the detection measuring force from the measuring portion and generates a touch signal when the detection measuring force coincides with a contact measuring force; a switch unit that switches a scanning measurement mode and a touch measurement mode; and a measurement value collecting unit that collects the measuring point information from the position detecting unit based on a predetermined condition when the switch unit is switched to the scanning measurement mode, the measurement value collecting unit collecting the measuring point information from the position detecting unit each time the touch signal is generated from the touch signal generating unit in a state where the switch unit is in the touch measurement mode, when the scanning controller is in operation. - View Dependent Claims (3, 4, 5, 7, 9, 14, 17)
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10. A surface texture measuring instrument, comprising:
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a measuring portion including a stylus having a contact portion that contacts a surface of a workpiece and a measuring force detecting unit that detects a measuring force when the contact portion contacts the surface of the workpiece; a relative movement unit that relatively moves the measuring portion and the workpiece; a position detecting unit that outputs as measuring point information a measuring point on which the workpiece is measured by the measuring portion, a force control loop that collects a measuring force detected by the measuring portion and drives the relative movement unit such that the detection measuring force substantially coincides with a target measuring force; a touch signal generating unit that collects the detection measuring force detected by the measuring portion and generates a touch signal when the detection measuring force coincides with a contact measuring force; and a measurement value collecting unit that collects the measuring point information from the position detecting unit each time the touch signal is generated from the touch signal generating unit, wherein the force control loop is adjustable such that the detection measuring force detected by the measuring force detecting unit oscillates. - View Dependent Claims (11, 12, 15, 18)
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Specification