Sensor-Equipped Joint Member
First Claim
1. A sensor-equipped joint member comprising:
- a channel block including a channel formed therein for communicating adjacent fluid control devices to each other at their lower-end openings; and
a sensor provided for the channel block.
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Accused Products
Abstract
The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus.
A sensor-equipped joint member 10 includes a channel block 41 including a V-shaped channel 41a formed therein for communicating adjacent fluid control devices 16 and 20 to each other at their lower-end openings, and a pressure sensor 42 provided on a side surface of the channel block 41. The channel block 41 is provided with a branched channel 41b which is branched from the V-shaped channel 41a and is communicated to the pressure sensor 42.
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Citations
12 Claims
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1. A sensor-equipped joint member comprising:
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a channel block including a channel formed therein for communicating adjacent fluid control devices to each other at their lower-end openings; and
a sensor provided for the channel block. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification