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MEMS DEVICE HAVING A RECESSED CAVITY AND METHODS THEREFOR

  • US 20070297037A1
  • Filed: 06/20/2007
  • Published: 12/27/2007
  • Est. Priority Date: 06/21/2006
  • Status: Active Grant
First Claim
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1. A microelectromechanical systems based device, comprising:

  • a transparent substrate having a microelectromechanical systems device formed thereon;

    a substantially planar backplate upon which a material is applied to form a raised perimeter structure; and

    a seal joining the raised perimeter structure of the backplate to the transparent substrate.

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