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Mastering tools and systems and methods for forming a cell on the mastering tools

  • US 20070297480A1
  • Filed: 06/22/2006
  • Published: 12/27/2007
  • Est. Priority Date: 06/22/2006
  • Status: Active Grant
First Claim
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1. A method for forming a cell on a mastering tool, comprising:

  • emitting a first laser light pulse from a laser for a first predetermined time interval such that at least a portion of the first laser light pulse forms the cell on the mastering tool, the cell having an opening size within a range of 10-100 micrometers and an aspect ratio less than or equal to 1.25.

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