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Semiconductor light-emitting device and method for separating semiconductor light-emitting devices

  • US 20070298529A1
  • Filed: 05/29/2007
  • Published: 12/27/2007
  • Est. Priority Date: 05/31/2006
  • Status: Abandoned Application
First Claim
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1. A method for separating semiconductor light-emitting devices formed on a substrate, said method comprising focusing a pulse laser beam having a pulse width less than 10 ps in said substrate, to thereby cause multi-photon absorption in said substrate;

  • forming a surface structurally changed portion by means of said pulse laser beam along a split line predetermined on a surface of said substrate;

    forming internal structurally changed portions through said pulse laser beam at a predetermined depth of said substrate on a predetermined split face, said internal structurally changed portions being discontinuous in a direction of said predetermined split line; and

    applying an external force to thereby form a split face along said surface structurally changed portion and said discontinuous internal structurally changed portions, whereby said semiconductor light-emitting devices are separated from one another.

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