Method for fabricating multiple FETs of different types
First Claim
1. A method of fabricating multiple field effect transistors (FETs), comprising:
- depositing a first conductive layer over first and second active regions of a semiconductor substrate;
patterning the first conductive layer over the second active region to form mold structures;
forming at least one mask structure between the mold structures;
patterning the second active region such that a remaining portion of the semiconductor substrate under each of the at least one mask structure forms a respective fin of a second field effect transistor (FET); and
patterning the first conductive layer over the first active region to form a first gate of a first field effect transistor (FET).
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Abstract
For fabricating multiple field effect transistors (FETs), a first conductive layer is deposited over first and second active regions of a semiconductor substrate. The first conductive layer is patterned over the second active region to form mold structures. Mask structures are formed between the mold structures. The second active region is patterned using the mask structures or using spacers formed at sidewalls of the mold structures to form multiple fins of a field effect transistor of a fin type. The first conductive layer is patterned over the first active region to form a gate of another field effect transistor of a different type.
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Citations
20 Claims
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1. A method of fabricating multiple field effect transistors (FETs), comprising:
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depositing a first conductive layer over first and second active regions of a semiconductor substrate; patterning the first conductive layer over the second active region to form mold structures; forming at least one mask structure between the mold structures; patterning the second active region such that a remaining portion of the semiconductor substrate under each of the at least one mask structure forms a respective fin of a second field effect transistor (FET); and patterning the first conductive layer over the first active region to form a first gate of a first field effect transistor (FET). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating multiple field effect transistors (FETs), comprising:
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depositing a first conductive layer over first and second active regions of a semiconductor substrate; patterning the first conductive layer over the second active region to form mold structures; forming spacers at sidewalls of the mold structures; patterning the second active region such that remaining portions of the semiconductor substrate under the spacers form fins of a second field effect transistor (FET); and patterning the first conductive layer over the first active region to form a first gate of a first field effect transistor (FET). - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification