Shadow mask and deposition device having the same

• US 20080000420A1
• Filed: 06/27/2007
• Published: 01/03/2008
• Est. Priority Date: 06/30/2006
• Status: Abandoned Application

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Philips LCD Company Limited (LG Display Co., Ltd.)
• Inventors: Lee, Sang Keun, Kim, Jeong Hyun, Lee, Jae Yoon
• Application Number:
  US11/823,545
• Publication Number:
  US 20080000420A1
• Time in Patent Office: Days
• US Class Current: 118/504
• CPC Class Codes: C23C 14/042 using masks

Abstract

Disclosed are a shadow mask and a deposition device having the same. The deposition device includes a shadow mask that has a plurality of openings, a chamber that has the shadow mask therein, a deposition cell disposed on a lower portion of the chamber, in which the deposition cell contains deposition materials, and a blocking member interposed between an inner side of the chamber and an outer side of the shadow mask so as to prevent the deposition materials from passing through between the inner side of the chamber and the outer side of the shadow mask. Deposition materials sublimated from a deposition cell are prevented from passing through the shadow mask, except for the openings of the shadow mask, so that the inside of a chamber can be prevented from being contaminated, thereby improving workability of a thin film deposition device. Deposition materials attached to the inside of the chamber can be prevented from being separated from the chamber, so the deposition materials cannot serve as particles.

Claims

1. A shadow mask comprising:

a mask body that has an outer side spaced along an inner side of a chamber by a predetermined interval; and

a plurality of openings disposed through the mask body.

2. The shadow mask as claimed in claim 1, wherein the chamber has a cylindrical shape and the mask body has a disk shape.

3. The shadow mask as claimed in claim 1, wherein the chamber has a hexahedral shape and the mask body has a rectangular plate shape.

4. A deposition device comprising:

a chamber;

a shadow mask that divides the chamber into an upper portion and a lower portion, and has a plurality of openings through which the upper portion is communicated with the lower portion;

a deposition cell disposed on the lower portion of the chamber, in which the deposition cell contains deposition materials; and

a supporting member disposed along an inner side of the chamber to support edges of the shadow mask.

5. The deposition device as claimed in claim 4, wherein the chamber has a cylindrical shape and the shadow mask has a disk shape.

6. The deposition device as claimed in claim 4, wherein the chamber has a hexahedral shape and the shadow mask has a rectangular plate shape.

7. The deposition device as claimed in claim 4, wherein the supporting member protrudes in a closed loop shape along the inner side of the chamber.

8. The deposition device as claimed in claim 4, wherein the supporting member includes a protrusion that protrudes from the inner side of the chamber by a predetermined length.

9. The deposition device as claimed in claim 4, wherein a substrate fixing unit is disposed in an upper portion of the chamber in order to fix a substrate.

10. A deposition device comprising:

a shadow mask that has a plurality of openings;

a chamber that has the shadow mask therein;

a deposition cell disposed on a lower portion of the chamber, in which the deposition cell contains deposition materials; and

a blocking member interposed between an inner side of the chamber and an outer side of the shadow mask so as to prevent the deposition materials from passing through between the inner side of the chamber and the outer side of the shadow mask.

11. The deposition device as claimed in claim 10, wherein the shadow mask has a rectangular plate shape and the chamber has a cylindrical shape.

12. The deposition device as claimed in claim 11, wherein the blocking member blocks a space between a side of the shadow mask and a curvature surface of the chamber.

13. The deposition device as claimed in claim 10, wherein the shadow mask has a disk shape and the chamber has a hexahedral shape.

14. The deposition device as claimed in claim 13, wherein the blocking member blocks a space between a curvature surface of the shadow mask and the inner side of the chamber.

15. The deposition device as claimed in claim 10, wherein the blocking member further comprises a stretching unit disposed on the inner side of the chamber so as to apply tension to the shadow mask in order to prevent the shadow mask from being bent.

16. The deposition device as claimed in claim 10, wherein the blocking member overlaps with edges of the shadow mask.

17. The deposition device as claimed in claim 10, wherein a heating unit is disposed around the deposition cell in order to heat the deposition cell.

18. The deposition device as claimed in claim 17, wherein the heating unit includes an electric heater.

19. The deposition device as claimed in claim 10, wherein a supporting member is disposed on the inner side of the chamber in order to support the blocking member.