Method of recycling crystal sensor of evaporation apparatus
First Claim
Patent Images
1. A method of recycling a crystal sensor of an evaporation device comprising:
- collecting the crystal sensor after performing a monitoring step for a material evaporated and deposited on a substrate for a preset period of time;
cleaning the crystal sensor by dipping the crystal sensor into a wet etchant; and
drying the cleaned crystal sensor.
2 Assignments
0 Petitions
Accused Products
Abstract
A method of cleaning a crystal sensor of an evaporation apparatus is disclosed, wherein the crystal sensor of monitoring an evaporation level is cleaned for the reuse of device, the method comprising collecting the crystal sensor after performing a monitoring step for a material evaporated and deposited on a substrate for a preset period of time, cleaning the crystal sensor by dipping the crystal sensor into a wet etchant, and drying the cleaned crystal sensor.
-
Citations
11 Claims
-
1. A method of recycling a crystal sensor of an evaporation device comprising:
-
collecting the crystal sensor after performing a monitoring step for a material evaporated and deposited on a substrate for a preset period of time; cleaning the crystal sensor by dipping the crystal sensor into a wet etchant; and drying the cleaned crystal sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
Specification