Method of recycling crystal sensor of evaporation apparatus

• US 20080000496A1
• Filed: 06/28/2007
• Published: 01/03/2008
• Est. Priority Date: 06/30/2006
• Status: Abandoned Application

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Philips LCD Company Limited (LG Display Co., Ltd.)
• Inventors: Jeon, Ae Kyung, Kim, Ock Hee
• Application Number:
  US11/819,732
• Publication Number:
  US 20080000496A1
• Time in Patent Office: Days
• US Class Current: 134/1
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/546 using crystal oscillators

Abstract

A method of cleaning a crystal sensor of an evaporation apparatus is disclosed, wherein the crystal sensor of monitoring an evaporation level is cleaned for the reuse of device, the method comprising collecting the crystal sensor after performing a monitoring step for a material evaporated and deposited on a substrate for a preset period of time, cleaning the crystal sensor by dipping the crystal sensor into a wet etchant, and drying the cleaned crystal sensor.

Claims

1. A method of recycling a crystal sensor of an evaporation device comprising:

collecting the crystal sensor after performing a monitoring step for a material evaporated and deposited on a substrate for a preset period of time;

cleaning the crystal sensor by dipping the crystal sensor into a wet etchant; and

drying the cleaned crystal sensor.

2. The method of claim 1, wherein cleaning the crystal sensor is performed by applying ultrasonic waves.

3. The method of claim 1, wherein drying the cleaned crystal sensor is performed at a temperature of 80°

C. to 500°

C.

4. The method of claim 1, wherein the material evaporated and deposited on the substrate is an organic material.

5. The method of claim 4, wherein cleaning the crystal sensor uses an organic solvent.

6. The method of claim 5, wherein the organic solvent is formed of at least one of acetone, IPA (alcohol-based (OH-based) material including Isopropyl Alcohol), MC (Methylene Chloride), THF (Tetrahydrofuran) and dichloride propane.

7. The method of claim 1, wherein the material evaporated and deposited on the substrate is an inorganic material.

8. The method of claim 7, wherein cleaning the crystal sensor uses an inorganic solvent.

9. The method of claim 8, wherein the inorganic solvent is formed of acid-mixed solvent.

10. The method of claim 8, wherein the inorganic solvent is formed of alkali-mixed solvent.

11. The method of claim 1, wherein the crystal sensor is periodically cleaned and dried.