Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
First Claim
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1. A method, comprising:
- deriving a model that comprises color parameters as a function of distance between two mirrors in a Fabry-Perot interferometer;
determining color parameters for light reflected from the Fabry-Perot interferometer at a particular location; and
comparing the determined color parameters with the model to estimate the distance between the two mirrors in the Fabry-Perot interferometer at the particular location.
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Abstract
Air gap variation in an interferometric modulator over a two-dimensional spatial map of the modulator is determined by acquiring a digital photograph of the modulator. Color parameters of individual pixels in the photograph are determined and compared to a model of color parameters as a function of air gap distance. The model and individual pixel color parameters may be plotted on a color space plot for comparison. The determined distances may be plotted over a two-dimensional spatial map of the interferometric modulator to visualize the mirror curvature and air gap variation.
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Citations
33 Claims
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1. A method, comprising:
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deriving a model that comprises color parameters as a function of distance between two mirrors in a Fabry-Perot interferometer; determining color parameters for light reflected from the Fabry-Perot interferometer at a particular location; and comparing the determined color parameters with the model to estimate the distance between the two mirrors in the Fabry-Perot interferometer at the particular location. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method, comprising:
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determining color parameters for light reflected from a Fabry-Perot interferometer; and determining, based upon the determined color parameters, a distance between two mirrors in the Fabry-Perot interferometer. - View Dependent Claims (18, 19, 20)
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21. A test station for constructing a two-dimensional map of distances between two mirrors in an interferometric modulator, the station comprising:
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a digital photograph acquisition system configured to acquire a digital photograph of the interferometric modulator; and a computer configured to determine color parameters for a plurality of regions in the digital photograph and compare the color parameters to a model in order to determine distances between the two mirrors for a plurality of locations in the interferometric modulator. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A test station for constructing a two-dimensional map of distances between two mirrors in an interferometric modulator, the station comprising:
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means for acquiring a digital photograph of the interferometric modulator; and means for determining color parameters for a plurality of regions in the digital photograph and comparing the color parameters to a model in order to determine distances between the two mirrors for a plurality of locations in the interferometric modulator. - View Dependent Claims (32, 33)
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Specification