Holding apparatus for substrate cassette and storage method for the same
First Claim
1. A holding apparatus for a substrate cassette, comprising:
- a cassette for storing a plurality of substrates;
a support base for holding the cassette; and
a tilting device fixed to the support base for allowing the support base to rotate about a horizontal axis from a horizontal position, wherein top surfaces of the substrates are arranged upwardly, to an over vertical position, wherein the top surfaces of the substrates are arranged downwardly, by rotating the support base over 90 degrees.
1 Assignment
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Accused Products
Abstract
A holding apparatus for a substrate cassette include a support base for holding the cassette with substrates. A tilting device is fixed to the support base for allowing the support base to rotate about a horizontal axis from a horizontal position, wherein top surfaces of the substrates are arranged upwardly, to an over vertical position, wherein the top surfaces of the substrates are arranged downwardly, by rotating the support base over 90 degrees. A storage method for a substrate cassette includes steps of storing a substrate in the cassette for substrates almost horizontally, fixing a cassette on a support base, and rotating the support base around a rotary shaft so that the substrate may rotate to the angle beyond 90 degrees.
16 Citations
17 Claims
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1. A holding apparatus for a substrate cassette, comprising:
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a cassette for storing a plurality of substrates; a support base for holding the cassette; and a tilting device fixed to the support base for allowing the support base to rotate about a horizontal axis from a horizontal position, wherein top surfaces of the substrates are arranged upwardly, to an over vertical position, wherein the top surfaces of the substrates are arranged downwardly, by rotating the support base over 90 degrees. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A storage method for a substrate cassette, comprising the steps of:
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storing substrates in a cassette for substrates almost horizontally; fixing the cassette on a support base; and rotating the support base around a rotary shaft until the substrate will rotate 90 degrees or more. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification