Support structure for free-standing MEMS device and methods for forming the same
First Claim
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1. A microelectromechanical (MEMS) device comprising:
- a functional layer comprising a first material; and
a deformable layer comprising a second material different from the first material, the deformable layer mechanically coupled to the functional layer at a junction, wherein the functional layer and the deformable layer have substantially equal internal stresses at the junction.
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Abstract
A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional layer at a junction. The functional layer and the deformable layer have substantially equal internal stresses at the junction.
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Citations
44 Claims
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1. A microelectromechanical (MEMS) device comprising:
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a functional layer comprising a first material; and a deformable layer comprising a second material different from the first material, the deformable layer mechanically coupled to the functional layer at a junction, wherein the functional layer and the deformable layer have substantially equal internal stresses at the junction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A microelectromechanical (MEMS) device comprising:
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means for controlling a signal, the controlling means comprising a first material; and means for supporting the controlling means, the supporting means comprising a second material different from the first material, the supporting means mechanically coupled to the controlling means at a junction, wherein the controlling means and the supporting means have substantially equal internal stresses at the junction. - View Dependent Claims (29, 30, 31)
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32. A method of manufacturing a microelectromechanical (MEMS) device on a substrate, the method comprising:
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forming a functional layer comprising a first material; forming a sacrificial layer comprising sacrificial material over the functional layer; forming a hole in the sacrificial layer to expose a portion of the functional layer; and forming a deformable layer comprising a second material over the sacrificial layer, the second material different from the first material, the deformable layer fusing to the functional layer at a junction in the exposed portion of the functional layer, wherein the functional layer and the deformable layer have substantially equal internal stresses at the junction. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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Specification