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Method of manufacturing MEMS devices providing air gap control

  • US 20080003737A1
  • Filed: 06/30/2006
  • Published: 01/03/2008
  • Est. Priority Date: 06/30/2006
  • Status: Active Grant
First Claim
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1. A method of making at least two types of microelecromechanical systems (MEMS) devices, the at least two types of MEMS devices having different release states after removal of sacrificial material, the method comprising:

  • providing a substrate;

    forming a first electrically conductive layer over at least a portion of the substrate;

    forming a first sacrificial layer over at least a portion of the first conductive layer;

    forming a plurality of electrically conductive moveable elements over the first sacrificial layer; and

    forming a plurality of flexure controllers over the substrate configured so as to operably support the electrically conductive moveable elements when the sacrificial layer is removed;

    the first sacrificial layer being removable to thereby release the MEMS devices and form cavities having at least two gap sizes between the first electrically conductive layer and the movable elements.

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