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Automatic defect review and classification system

  • US 20080004742A1
  • Filed: 08/24/2007
  • Published: 01/03/2008
  • Est. Priority Date: 06/13/2005
  • Status: Active Grant
First Claim
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1. An automatic defect review and classification system including at least one automatic defect review apparatus (hereinafter called “

  • ADR apparatus”

    ) for specifically observing defect portions of a sample and automatically acquiring images and at least one automatic defect classification function (hereinafter called “

    ADC apparatus”

    ) for automatically classifying the defects by using the images acquired by said ADR apparatus in accordance with the kind of the defects, comprising;

    a function which display a status for combination of said ADR apparatus and said ADC apparatus to a GUI;

    wherein said ADC apparatus to be connected to said ADR apparatus can be changed manually on the GUI.

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