Metal organic chemical vapor deposition equipment
First Claim
1. Metal organic chemical vapor deposition equipment for forming a film on a substrate by using a reactant gas, comprising:
- a heating component heating said substrate and having a holding surface for holding said substrate; and
a flow channel for introducing said reactant gas to said substrate, whereinsaid heating component is rotatable with said holding surface kept facing an inner portion of said flow channel, anda height of said flow channel along a flow direction of said reactant gas is kept constant from an upstream side lateral end of a position for holding said substrate at said holding surface to an arbitrary position of said holding surface, and is monotonically decreased from said arbitrary position to a downstream side.
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Accused Products
Abstract
Metal organic chemical vapor deposition equipment is metal organic chemical vapor deposition equipment for forming a film on a substrate by using a reactant gas, and includes a susceptor heating the substrate and having a holding surface for holding the substrate, and a flow channel for introducing the reactant gas to the substrate. The susceptor is rotatable with the holding surface kept facing an inner portion of the flow channel, and a height of the flow channel along a flow direction of the reactant gas is kept constant from a position to a position, and is monotonically decreased from the position to the downstream side. It is thereby possible to improve film formation efficiency while allowing the formed film to have a uniform thickness.
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Citations
6 Claims
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1. Metal organic chemical vapor deposition equipment for forming a film on a substrate by using a reactant gas, comprising:
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a heating component heating said substrate and having a holding surface for holding said substrate; and a flow channel for introducing said reactant gas to said substrate, wherein said heating component is rotatable with said holding surface kept facing an inner portion of said flow channel, and a height of said flow channel along a flow direction of said reactant gas is kept constant from an upstream side lateral end of a position for holding said substrate at said holding surface to an arbitrary position of said holding surface, and is monotonically decreased from said arbitrary position to a downstream side. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification