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SYSTEM FOR MEGASONIC PROCESSING OF AN ARTICLE

  • US 20080006292A1
  • Filed: 08/16/2007
  • Published: 01/10/2008
  • Est. Priority Date: 09/30/1996
  • Status: Active Grant
First Claim
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1. A system for megasonic processing of an article comprising:

  • a rotary support for supporting an article;

    a dispenser for applying a fluid to a surface of an article positioned on the rotary support; and

    a transducer assembly comprising (i) a transmitter positioned adjacent to the article on the rotary support so that when the fluid is applied to the surface of the article via the dispenser, a meniscus of the fluid is formed between a portion of the transmitter and the surface of the article and (ii) not more than one transducer coupled to the transmitter, the transducer adapted to oscillate at a frequency for propagating megasonic energy through the transmitter and into the meniscus of the fluid.

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