INFRARED GAS DETECTION SYSTEMS AND METHODS

• US 20080006775A1
• Filed: 06/22/2007
• Published: 01/10/2008
• Est. Priority Date: 06/22/2006
• Status: Abandoned Application

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Tom, Glenn, Marganski, Paul, Lurcott, Steven, Hillas, Robert, Arno, Jose
• Application Number:
  US11/767,382
• Publication Number:
  US 20080006775A1
• Time in Patent Office: Days
• US Class Current: 250/338.5
• CPC Class Codes: G01N 2021/178 Methods for obtaining spatial resolution of the property being measured
• CPC Class Codes: G01N 2021/317 Special constructive features
• CPC Class Codes: G01N 21/05 Flow-through cuvettes G01N21/09 takes precedence; handling fluid samples G01N1/10
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: G01N 2201/0846 Fibre interface with sample, e.g. for spatial resolution

Abstract

Thermopile-based detection and monitoring/control systems are described, in applications such as inferring concentration of a multicomponent gas by sensing a tracer gas therein, utilizing fiber optic cables to provide multiple sensing paths in a cell, utilizing a modulated IR source switched in on/off cycles, verifying chemical reagent identities, and sensing of effluent following discharge from a contamination removal 8 element or cold trap. A thermopile infrared (TPIR) detector of highly compact character is described for such applications, and permits monitoring of species that may be problematic or otherwise deleterious in such environments. In one implementation, light source modulation and signal processing techniques are employed to improve signal to noise ratio and minimize calibration and complexity of the TPIR detector.

Claims

1. A gas monitoring system including a TPIR detector, operatively arranged for a sensing operation comprising any of:

(a) sensing of a multicomponent gas to determine a concentration of a component therein other than a component detectible by the TPIR detector;

(b) sensing of gas in a cell having a multiplicity of zones therein defined using fiber optic cables to provide a multiplicity of gas sensing paths within the cell;

(c) sensing with a modulated infrared radiation source switched in on/off cycles;

(d) sensing of a fluid sampled from a supply package to verify identity of fluid contained within said supply package;

(e) sensing of effluent from an environment after treatment to remove contaminants therefrom; and

(f) sensing of effluent from a cold trap system to determine when a cold trap has been loaded and requires regeneration.

2. The system of claim 1, operatively arranged for sensing of a multicomponent gas to determine a concentration of a component therein other than a component detectible by the TPIR detector.

3. The system of claim 1, operatively arranged for sensing of gas in a cell having a multiplicity of zones therein defined using fiber optic cables to provide a multiplicity of gas sensing paths within the cell.

4. The system of claim 1, operatively arranged for sensing with a modulated infrared radiation source switched in on/off cycles

5. The system of claim 1, operatively arranged for sensing of a fluid sampled from a supply package to verify identity of fluid contained within said supply package

6. The system of claim 1, operatively arranged for sensing of effluent from an environment after treatment to remove contaminants therefrom.

7. The system of claim 1, operatively arranged for sensing of effluent from a cold trap to determine when the cold trap has been loaded and requires regeneration.

8. The system of claim 1, wherein the gas comprises any of:

a fluorocarbon, a chlorofluorocarbon, a halocarbon, a sulfur halide gas, nitrogen trifluoride, sulfur hexafluoride, and a refrigerant fluid.

9. The system of claim 1, wherein the TPIR detector includes an elongate cell.

10. The system of claim 1, further comprising an alarm adapted to output a user-perceptible signal indicative of attainment of a specified condition.

11. The system of claim 5, wherein the supply package comprises a liner-based supply package and the fluid contained therein comprises a microelectronic device manufacturing reagent.

12. The system of claim 6, wherein said environment comprises a glove box isolator environment.

13. The system of claim 1, operatively arranged for a sensing operation comprising at least two of elements (a)-(f).

14. A gas sensing process comprising use of a system according claim 1.

32. The method of claim 1, comprising sensing at least two of elements (a)-(f).

15. A method of gas sensing comprising any of:

(a) sensing of a multicomponent gas to determine a concentration of a component therein other than a component detectible by the TPIR detector;

(b) sensing of gas in a cell having a multiplicity of zones therein defined using fiber optic cables to provide a multiplicity of gas sensing paths within the cell;

(c) sensing with a modulated infrared radiation source switched in on/off cycles;

(d) sensing of a fluid for verification of identity thereof in a supply package containing such fluid;

(e) sensing of effluent from an environment after treatment to remove contaminants therefrom; and

(f) sensing of effluent from a cold trap system to determine when a cold trap has been loaded and requires regeneration,

wherein the sensing comprises thermopile detection of radiation in an infrared spectral regime.

16. The method of claim 15, comprising sensing of a multicomponent gas to determine a concentration of a component therein other than a component detectible by the TPIR detector.

17. The method of claim 15, comprising sensing of gas in a cell having a multiplicity of zones therein defined using fiber optic cables to provide a multiplicity of gas sensing paths within the cell.

18. The method of claim 15, comprising sensing with a modulated infrared radiation source switched in on/off cycles.

19. The method of claim 15, comprising sensing of a fluid for verification of identity thereof in a supply package containing such fluid.

20. The method of claim 15, comprising sensing of effluent from an environment after treatment to remove contaminants therefrom.

21. The method of claim 15, comprising sensing of effluent from a cold trap to determine when the cold trap has been loaded and requires regeneration.

22. The method of claim 15, wherein the sensed gas comprises any of:

a fluorocarbon, a chlorofluorocarbon, a halocarbon, a sulfur halide gas, nitrogen trifluoride, sulfur hexafluoride, and a refrigerant fluid.

23. The method of claim 15, wherein the TPIR detector includes an elongate cell.

24. The method of claim 15, further comprising activating an alarm adapted to output a user-perceptible signal indicative of attainment of a specified condition.

25. The method of claim 19, wherein the supply package comprises a liner-based supply package and the fluid contained therein comprises a microelectronic device manufacturing reagent.

26. The method of claim 20, wherein said environment comprises a glove box isolator environment.

27. The method of claim 20, wherein said treatment to remove contaminants comprises use of a catalytic removal system comprising a first catalyst bed and a second catalyst bed, further comprising, responsive to said sensing, effecting switching between the first catalyst bed and the second catalyst bed trap when any of the first catalyst bed and the second catalyst bed requires regeneration.

28. The method of claim 27, further comprising initiating regeneration of any of the first catalyst bed and the second catalyst bed responsive to said sensing.

29. The method of claim 21, wherein the cold trap system comprises a first cold trap and a second cold trap, further comprising, responsive to said sensing, effecting switching between the first cold trap and the second cold trap when any of the first cold trap and the second cold trap has been loaded and requires regeneration.

30. The method of claim 29, further comprising initiating regeneration of any of the first cold trap and the second cold trap responsive to said sensing.

31. The method of claim 15, further comprising wireless communication of a signal correlative of a thermopile detector output.