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REDUCTION OF MEMS MIRROR EDGE DIFFRACTION IN A WAVELENGTH SELECTIVE SWITCH USING SERVO-BASED ROTATION ABOUT MULTIPLE NON-ORTHOGONAL AXES

  • US 20080008415A1
  • Filed: 08/31/2006
  • Published: 01/10/2008
  • Est. Priority Date: 04/11/2005
  • Status: Active Grant
First Claim
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1. Optical apparatus for switching multi-channel optical signals having spectral channels of different wavelengths, comprising:

  • a plurality of input and output ports for optical signals having one or more of said spectral channels;

    an optical beam expander and relay system adapted to receive the optical signals from one or more of the input ports, the anamorphic system being formed to convert the optical signals to spectral beams having a predetermined elongated beam profile;

    a wavelength separator for spatially separating the spectral beams into constituent spectral channels; and

    an array of channel micromirrors, each channel micromirror of the array being positioned to receive one of said constituent spectral channels, the micromirrors being rotatable about a switching axis y to switch said one spectral channel to a selected output port;

    wherein each channel micromirror is rotatable about an attenuation axis x to vary coupling of said one spectral channel to the selected output port to control a power level of the spectral channel output at such selected port, wherein the attenuation axis is different from the switching axis, wherein each channel micromirror is configured to dither with respect to a dither axis y′

    that is substantially tangent to a contour of constant attenuation by rotating simultaneously about the switching axis y and the attenuation axis x, wherein the dither axis is non-orthogonal to an effective attenuation axis, and wherein each channel micromirror is configured to attenuate the power level by rotating the mirror with respect to the effective attenuation axis x′

    through a combination of rotations about the switching axis y and the attenuation axis x, wherein rotating the mirrors about the dither axis y′ and

    the effective attenuation axis x′

    reduces a non-uniform attenuation of a passband of the apparatus due to diffraction of a spectral beam from an edge of one or more of the micromirrors, wherein the edge is substantially parallel to the attenuation axis.

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