Coiled circuit bio-sensor
First Claim
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1. A coiled bio-medical device, comprising:
- a base layer coiled to form a plurality of concentric cylinders, wherein the base layer comprises an inner surface;
a bio-sensor, wherein the bio-sensor is arranged on the inner surface of the coiled base layer and wherein the bio-sensor is adapted to collect bio-medical data from an organism; and
a transmitter, wherein the transmitter is arranged on the inner surface of the base layer and wherein the transmitter is adapted to transmit the collected bio-medical data.
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Abstract
A coiled bio-medical device has a base layer coiled to form a plurality of concentric cylinders. The base layer comprises an inner surface. The coiled bio-medical includes a bio-sensor arranged on the inner surface of the base layer. The bio-sensor is adapted to collect bio-medical data from an organism. A transmitter is arranged on the inner surface of the base layer and is adapted to transmit the collected bio-medical data.
44 Citations
24 Claims
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1. A coiled bio-medical device, comprising:
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a base layer coiled to form a plurality of concentric cylinders, wherein the base layer comprises an inner surface;
a bio-sensor, wherein the bio-sensor is arranged on the inner surface of the coiled base layer and wherein the bio-sensor is adapted to collect bio-medical data from an organism; and
a transmitter, wherein the transmitter is arranged on the inner surface of the base layer and wherein the transmitter is adapted to transmit the collected bio-medical data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for fabricating a coiled bio-medical device, comprising:
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depositing a silicon oxide layer on a silicon substrate;
depositing a device layer over the deposited silicon oxide layer;
forming active circuitry including a bio-sensor on the device layer;
depositing a stress inducing layer on the active circuitry including the bio-sensor;
releasing the device layer including the active circuitry deposited with the stress inducing layer by etching the silicon oxide layer from the silicon substrate; and
coiling the device layer having the active circuitry as the device layer is released from the silicon substrate forming the coiled bio-medical device, wherein internal stresses in the stress inducing layer cause the coiling as the device layer is released. - View Dependent Claims (16, 17, 18)
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19. A coiled biomedical device, comprising:
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a coiling layer including stressed silicon nitride;
a circuit device layer, wherein the circuit device layer comprises single crystal silicon; and
a bio-sensor fabricated on the single crystal silicon, wherein the bio-sensor comprises thin complementary metal oxide semiconductor (CMOS) circuitry, and the coiling layer is formed onto a surface of and coupled to the circuit device layer, the coiling layer having intrinsic stresses which cause coiling of the coiling layer and the circuit device layer when the circuit device layer is released from an underlying substrate. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification