Classifying faults associated with a manufacturing process
First Claim
1. A method for classifying faults associated with a manufacturing process, the method comprising:
- determining that a fault exists when at least one of a(a) T2 score, calculated based on a Hotelling-type calculation performed on a first subset of a plurality of manufacturing process-related variables, exceeds a predetermined T2 critical value or,(b) DModX score, calculated based on a DModX-type calculation performed on a second subset of the plurality of manufacturing process-related variables, exceeds a predetermined DModX critical value;
generating fault vectors for each of the calculation types performed in which the corresponding score exceeds the corresponding critical value;
comparing the generated fault vectors to a plurality of corresponding, previously-defined fault vectors to determine a comparison value indicative of a correlation between the generated fault vectors and the plurality of corresponding, previously-defined fault vectors; and
associating each of the generated fault vectors with at least one of a first class of vectors indicative of a known fault or a second class of vectors indicative of an unknown fault based in part on the comparison value.
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Abstract
Faults that are associated with a set of variables that are each associated with a manufacturing parameter are classified. A fault vector is defined according to a multivariate analysis based on a contribution to a metric of a subset of the variables. The fault vector is compared to a plurality of previously-defined fault vectors to determine a comparison value indicative of a correlation between the fault vector and the plurality of previously-defined fault vectors. The fault vector is associated with at least one of a first set of fault vectors indicative of a known fault or a second set of fault vectors indicative of an unknown fault based in part on the comparison value.
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Citations
25 Claims
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1. A method for classifying faults associated with a manufacturing process, the method comprising:
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determining that a fault exists when at least one of a (a) T2 score, calculated based on a Hotelling-type calculation performed on a first subset of a plurality of manufacturing process-related variables, exceeds a predetermined T2 critical value or, (b) DModX score, calculated based on a DModX-type calculation performed on a second subset of the plurality of manufacturing process-related variables, exceeds a predetermined DModX critical value; generating fault vectors for each of the calculation types performed in which the corresponding score exceeds the corresponding critical value; comparing the generated fault vectors to a plurality of corresponding, previously-defined fault vectors to determine a comparison value indicative of a correlation between the generated fault vectors and the plurality of corresponding, previously-defined fault vectors; and associating each of the generated fault vectors with at least one of a first class of vectors indicative of a known fault or a second class of vectors indicative of an unknown fault based in part on the comparison value.
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2. A method for classifying a fault associated with a set of variables each associated with a manufacturing parameter, the method comprising:
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defining a fault vector according to a multivariate analysis based on a contribution of a subset of the set of variables to a metric; comparing the fault vector to a plurality of previously-defined vectors to determine a comparison value indicative of a correlation between the fault vector and the plurality of previously-defined vectors; and associating the fault vector with at least one of a first set of fault vectors indicative of a known fault or a second set of fault vectors indicative of an unknown fault based in part on the comparison value. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A system for classifying a fault associated with a set of variables each associated with a manufacturing parameter, the system comprising:
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a means for defining a fault vector according to a multivariate analysis based on a contribution of a subset of the set of variables to a metric; a means for comparing the fault vector to a plurality of previously-defined vectors to determine a comparison value indicative of a correlation between the fault vector and the plurality of previously-defined vectors; and a means for associating the fault vector with at least one of a first set of fault vectors indicative of a known fault or a second set of fault vectors indicative of an unknown fault based in part on the comparison value. - View Dependent Claims (23)
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24. A computer program product, tangibly embodied in an information carrier, the computer program product including instructions being operable to cause data processing apparatus to:
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define a fault vector according to a multivariate analysis based on a contribution to a metric of a subset of a set of variables each associated with a manufacturing parameter; compare the fault vector to a plurality of previously-defined vectors to determine a comparison value indicative of a correlation between the fault vector and the plurality of previously-defined vectors; and associate the fault vector with at least one of a first set of fault vectors indicative of a known fault or a second set of fault vectors indicative of an unknown fault based in part on the comparison value. - View Dependent Claims (25)
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Specification