SINGLE SIDE WORKPIECE PROCESSING

• US 20080011334A1
• Filed: 07/24/2007
• Published: 01/17/2008
• Est. Priority Date: 02/22/2006
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Rye, Jason, Woodruff, Daniel, Hanson, Kyle
• Granted Patent: US 8,104,488 B2
• Time in Patent Office: Days
• US Class Current: 134/95.1
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: H01L 21/68728 characterised by a plurality of separate clamping members, e.g. clamping fingers
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

A centrifugal workpiece processor for processing semiconductor wafers and similar workpieces includes a head which holds and spins the workpiece. The head includes a rotor having a gas system. Gas or air is sprayed or jetted from inlets in the rotor to create a rotational gas flow. The rotational gas flow causes pressure conditions which hold the edges of a first side of the workpiece against an angled annular surface on the rotor. The rotor and the workpiece rotate together. Guide pins adjacent to a perimeter may help to align the workpiece with the rotor. Outlets through the rotor allow gas to flow out of the rotor.

Claims

1. A workpiece processor comprising:

a bowl having one or more process fluid inlets;

a head which may be engaged with the bowl during workpiece processing;

a rotor supported on the head and rotatable relative to the head, with the rotor having a lower end including an outer annular surface and an inner annular surface adjoining the outer annular surface and oriented at an angle CC relative to the outer annular surface; and

a rotational gas flow system in the rotor including an annular slot extending around the rotor, and a plurality of bores extending into the rotor and connecting into the annular slot.

2. The workpiece processor of claim 1 with the rotor adapted to hold a workpiece with an edge of the workpiece supported on the inner annular surface.

3. The workpiece processor of claim 1 with the angle CC ranging from about 1-10 degrees.

4. The workpiece processor of claim 1 with the inner annular surface radially extending from the annular slot to the outer annular surface.

5. The workpiece processor of claim 1 with substantially each of the bores forming an angle AA with a diameter of the rotor extending through the bore, and with angle AA ranging from about 50-75 degrees.

6. The workpiece processor of claim 1 with the rotor having at least 40 bores substantially equally spaced apart around a lower rim of the rotor.

7. The workpiece processor of claim 1 further comprising a plurality of spaced apart wafer locating pins on the outer annular surface.

8. The workpiece processor of claim 1 with the inner annular surface extending at an upward angle towards a central axis of the rotor.

9. The workpiece processor of claim 1 wherein angle CC is a negative angle.

10. The workpiece processor of claim 1 with the rotational gas flow system further including an annular outflow space leading from cylindrical space within the rotor to the slot.

11. A workpiece processor comprising:

a bowl having one or more process fluid nozzles;

a head which may be engaged with the bowl during workpiece processing;

a rotor in the head and rotatable relative to the bowl, with the rotor having a lower end including an outer annular surface and an inner annular surface adjoining the outer annular surface and oriented at an angle CC relative to the outer annular surface, with the rotor adapted to hold a workpiece with only an outer edge of the workpiece supported on the inner annular surface; and

an annular slot extending around the lower end of the rotor, and a plurality of bores extending through a sidewall of the rotor and connecting into the annular slot.

12. The processor of claim 11 with the sidewall forming an interior rotor space and with an annular outflow space extending from the interior rotor space to the slot.

13. A workpiece processor comprising:

a bowl having one or more process fluid nozzles;

a head associated with the bowl;

a rotor in the head;

a motor in the head linked to the rotor, for rotating the rotor;

an interior space in the rotor;

a plurality of gas openings positioned to create a circular flow of gas in the interior space within the rotor;

a plurality of bores extending through a sidewall of the rotor; and

an annular slot extending from the interior space of the rotor and intersecting substantially each of the bores.

14. The processor of claim 13 with the bores oriented at a leading angle.

15. The processor of claim 13 with the rotor having a lower end including an outer annular surface and an inner annular surface adjoining the outer annular surface and oriented at an angle CC relative to the outer annular surface.

16. The processor of claim 13 further comprising a counter bore in the lower end of the rotor, with the counter bore having an upper annular surface extending radially outward from the slot.

17. The processor of claim 16 with the counter bore having a depth at least as great as the thickness of the workpiece.

18. The processor of claim 16 with the upper annular surface oriented at a non-perpendicular angle to an axis of rotation of the rotor.

19. The processor of claim 15 further comprising a plurality of recesses in the inner annular surface.