HEAT STABILIZED SUB-STOICHIOMETRIC DIELECTRICS
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Abstract
A sub-stoichiometric oxide, nitride or oxynitride layer in an optical stack, alone or in direct contact with one or two stabilizing layers, stabilizes the optical properties of the stack. The stabilizing layer(s) can stabilize the chemistry and optical properties of the sub-stoichiometric layer during heating. The change in optical characteristics of the sub-stoichiometric layer upon heating can counter the change in optical characteristics of the rest of the optical stack.
34 Citations
40 Claims
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1-16. -16. (canceled)
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17. :
- A method of making an optical stack, the method comprising
laminating a stabilizing layer and a sub-stoichiometric layer; and
producing an optical stack comprising the sub-stoichiometric layer in direct contact with the stabilizing layer, wherein the sub-stoichiometric layer consists of a homogeneous sub-stoichiometric composition selected from the group consisting of oxides, nitrides and oxynitrides, where the sub-stoichiometric composition comprises at least one element selected from the group consisting of metal elements and semiconductor elements, and the sub-stoichiometric composition further comprises a sub-stoichiometric amount of at least one element selected from the group consisting of oxygen and nitrogen;
the stabilizing layer comprises the at least one element selected from the group consisting of metal elements and semiconductor elements, and a stoichiometric amount of the at least one element selected from the group consisting of oxygen and nitrogen; and
the sub-stoichiometric layer is from 10 to 100 nm thick and thicker than the stabilizing layer.
- A method of making an optical stack, the method comprising
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18-36. -36. (canceled)
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37. :
- A method of making an optical stack, the method comprising
laminating a first stabilizing layer, a sub-stoichiometric layer and a second stabilizing layer; and
producing an optical stack comprising the sub-stoichiometric layer sandwiched between and in direct contact with the first stabilizing layer and the second stabilizing layer, wherein the sub-stoichiometric layer consists of a sub-stoichiometric composition selected from the group consisting of oxides, nitrides and oxynitrides, where the sub-stoichiometric composition comprises at least one element selected from the group consisting of metal elements and semiconductor elements, and the sub-stoichiometric composition further comprises a sub-stoichiometric amount of at least one element selected from the group consisting of oxygen and nitrogen; and
the first stabilizing layer and the second stabilizing layer each comprises the at least one element selected from the group consisting of metal elements and semiconductor elements, and a stoichiometric amount of the at least one element selected from the group consisting of oxygen and nitrogen.
- A method of making an optical stack, the method comprising
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38-39. -39. (canceled)
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40. :
- A method of making an optical stack, the method comprising
tempering an optical stack comprising a homogeneous sub-stoichiometric layer of sub-stoichiometric NiCrOx, wherein the sub-stoichiometric layer is from 2 to 20 nm thick; and
during the tempering the absolute change in transmission of the optical stack is 1.00% or less.
- A method of making an optical stack, the method comprising
Specification