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Monolithic stage devices providing motion in six degrees of freedom

  • US 20080012431A1
  • Filed: 05/18/2007
  • Published: 01/17/2008
  • Est. Priority Date: 05/18/2006
  • Status: Active Grant
First Claim
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1. A stage device, comprising:

  • a carrier;

    multiple linear EM actuators coupling the carrier monolithically to a base and collectively providing controlled movability of the carrier relative to the base in all six DOFs (X, Y, Z, θ

    X, θ

    Y, θ

    Z); and

    the multiple linear EM actuators comprising at least one multiple-DOF linear actuator but fewer than six linear EM actuators.

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