Monolithic stage devices providing motion in six degrees of freedom
First Claim
1. A stage device, comprising:
- a carrier;
multiple linear EM actuators coupling the carrier monolithically to a base and collectively providing controlled movability of the carrier relative to the base in all six DOFs (X, Y, Z, θ
X, θ
Y, θ
Z); and
the multiple linear EM actuators comprising at least one multiple-DOF linear actuator but fewer than six linear EM actuators.
1 Assignment
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Accused Products
Abstract
Stage devices are disclosed for various uses including use as a reticle stage or substrate stage in a microlithography system. An exemplary device includes a carrier and multiple linear EM actuators that couple the carrier monolithically to a base. The linear EM actuators collectively provide controlled movability of the carrier relative to the base in all six DOFs (X, Y, Z, θX, θY, θZ). The multiple linear EM actuators comprise at least one multiple-DOF linear actuator but fewer than six linear EM actuators. For example, the stage device can have two two-DOF linear actuators providing respective motions of the carrier in the X, Y and Y, Z DOFs (and collectively in all six DOFs) or can have two two-DOF linear actuators providing motions of the carrier in the Y, Z, θX, θY, and θZ DOFs and a one-DOF linear actuator providing motions in the X DOF.
42 Citations
55 Claims
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1. A stage device, comprising:
-
a carrier;
multiple linear EM actuators coupling the carrier monolithically to a base and collectively providing controlled movability of the carrier relative to the base in all six DOFs (X, Y, Z, θ
X, θ
Y, θ
Z); and
the multiple linear EM actuators comprising at least one multiple-DOF linear actuator but fewer than six linear EM actuators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A stage device, comprising:
-
a carrier having first and second opposing regions;
a first two-DOF linear motor coupled to the first region of the carrier and configured to provide, when actuated, motion of the carrier relative to a base in two of X, Y, and Z DOFs;
a second two-DOF linear motor coupled to the second region of the carrier and configured to provide, when actuated in coordination with the first two-DOF linear motor, motion of the carrier relative to the base in two of X, Y, and Z DOFs; and
a third linear motor coupled to the carrier and configured to provide, when actuated, motion of the carrier relative to the base at least in the remaining of the X, Y, and Z DOFs;
the first, second, and third linear motors being further configured to provide, when actuated in coordination with each other, motion of the carrier relative to the base in all six DOFs (X, Y, Z, θ
X, θ
Y, θ
Z). - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A stage device, comprising:
-
a carrier;
a first two-DOF linear motor coupled to the carrier and configured to provide, when actuated, motion of the carrier relative to a base in two of X, Y, and Z DOFs; and
a second two-DOF linear motor coupled to the carrier and configured to provide, when actuated, motion of the carrier relative to the base in two of X, Y, and Z DOFs, wherein one of the X, Y, and Z DOFs of the second two-DOF linear motor is one of the X, Y, and Z DOFs of the first two-DOF linear motor;
the first and second linear motors further being configured to provide, when actuated in coordination with each other, motion of the carrier relative to the base in the X, Y, and Z DOFs and respective angular motions of the carrier relative to the base in θ
X, θ
Y, and θ
Z DOFs, thereby providing the carrier with six DOFs of motion relative to the base. - View Dependent Claims (28, 29, 30, 31, 32)
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33. A reticle stage, comprising:
-
a monolithic reticle carrier having first and second opposing regions;
a first two-DOF linear motor coupled to the first region of the carrier and configured to provide, when actuated, motion of the carrier relative to a base in two of X, Y, and Z DOFs;
a second two-DOF linear motor coupled to the second region of the carrier and configured to provide, when actuated in coordination with the first two-DOF linear motor, motion of the carrier relative to the base in the two of the X, Y, and Z DOFs; and
a third linear motor coupled to the carrier and configured to provide, when actuated, motion of the carrier relative to the base in the remaining of the X, Y, and Z DOFs;
the first, second, and third linear motors being further configured to provide, in coordination with each other, motion of the carrier relative to the base in all six DOFs (X, Y, Z, θ
X, θ
Y, θ
Z). - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 54)
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44. A reticle stage, comprising:
-
a monolithic reticle carrier;
a first two-DOF linear motor coupled to the carrier and configured to provide, when actuated, motion of the carrier relative to a base in X and Y DOFs; and
a second two-DOF linear motor coupled to the carrier and configured to provide, when actuated, motion of the carrier relative to the base in Y and Z DOFs;
the first and second linear motors further being configured to provide, when actuated in coordination with each other, motion of the carrier relative to the base in the X, Y, and Z DOFs and respective angular motions of the carrier relative to the base in θ
X, θ
Y, and θ
Z DOFs, thereby providing the carrier with six DOFs of motion relative to the base. - View Dependent Claims (45, 46, 47, 48, 49, 50, 51, 52, 53, 55)
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Specification