Planar Motor Device, Stage Device, Exposure Device and Device Manufacturing Method

• US 20080012511A1
• Filed: 07/13/2005
• Published: 01/17/2008
• Est. Priority Date: 07/15/2004
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Ono, Kazuya
• Application Number:
  US11/632,401
• Publication Number:
  US 20080012511A1
• Time in Patent Office: Days
• US Class Current: 318/35
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H02K 1/146 consisting of a generally annular yoke with salient poles
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing

Abstract

A planar motor device and the like which can shift at a high acceleration, provide a high aligning accuracy and can be efficiently driven is provided. The planar motor (15) includes a fixed part (16) provided on a base member (14), and a moving part (17) provided on a stage unit (WST1). The fixed part (16) is provided with core members (22), which are arranged at prescribed intervals within an XY plane with a coil (21) wound around, and leading edge parts of head parts (22a) of the core members (22) are set to be within a substantially one plane. On the bottom plane of a first stage (25) of the stage unit (WST1), permanent magnets (26) are arranged at prescribed intervals in an X direction and a Y direction.

Claims

1. Planar motor device comprising a fixed part which forms a predetermined moving surface and a moving part which is movable along the moving surface, wherein the fixed part includes a plurality of core members arranged along the moving surface and each including a magnetic material and coils magnetically connected to the core members, respectively, and wherein the moving part includes magnetic members arranged along the moving surface on the side opposite to the fixed part.

2. Planar motor device according to claim 1, wherein the fixed part supports the respective core members and is provided with a base member for magnetically connecting the core members.

3. Planar motor device according to claim 1, wherein the fixed part includes a separator made of a nonmagnetic material provided between the core members.

4. Planar motor device according to claim 3, wherein the plurality of core members are arranged in a matrix within a plane substantially parallel to the moving surface, and wherein the separator made of the nonmagnetic material is placed between at least one of the core members and a core member adjacent thereto in a first direction and between at least one of the core members and a core member adjacent thereto in a second direction substantially perpendicular to the first direction.

5. Planar motor device according claim 1, wherein the fixed part has a plane substantially parallel to the moving surface and includes a guide member placed between the core members and the moving part.

6. Planar motor device according to claim 5, wherein the guide member includes ceramic.

7. Planar motor device according to claim 5, wherein the ceramic is formed by thermal spraying.

8. Planar motor device according to claim 1, wherein the core members and the separator constitute a wall surface which forms a part of a flow path of refrigerant for cooling down the coils.

9. Planar motor device according to claim 1, wherein the moving part includes a stage on which an object is mounted and an adjustment mechanism that adjusts at least one of the position and the posture of the stage.

10. Planar motor device according to claim 9, wherein the adjustment mechanism adjusts the position of the table in two intersecting directions within the plane parallel to the moving surface and in at least one direction intersecting the moving surface.

11. Planar motor device according to claim 9, wherein the adjustment mechanism adjusts the posture of the stage by adjusting the amount of rotation of the table around the two intersecting directions within the plane parallel to the moving surface and around at least one direction intersecting the moving surface.

12. Planar motor device according to claim 1, wherein the moving part has a plurality of air outlets on the side opposite to the fixed part.

13. Planar motor device according to claim 1, wherein thermal insulation is provided between the core members and the coils.

14. Planar motor device according to claim 1, wherein a plurality of moving parts movable along the moving surface are provided.

15. Stage device comprising a stage on which an object is mounted, wherein the planar motor device according to claim 1 is provided therein as driver of the stage.

16. Exposure device, provided with a mask stage that holds a mask and a substrate stage that holds a substrate, and transfers a pattern formed on the mask onto the substrate, wherein the exposure device is provided with the stage device according to claim 15 as at least one of the mask stage and the substrate stage.

17. A device manufacturing method including a lithography process, wherein the exposure device according to claim 16 is used in the lithography process.